[1] EMSLIE A G,BONNER F T,PECK L G.Flow of a viscous liquid on a rotating disk[J].J A P,1958,29:858~862.
[2] 王浩敏,李佐宜,林更琪 et al.光波导用玻璃薄膜的制备及其性能研究[J].光电子技术与信息,2002,15(1):28~31.
[3] DAMON G F.The effects of whirler acceleration on the properties of the photoresist film[A].Proceedings of the Second Kodak Seminar on microminiaturization[C].New York:Eastman Kodak Co,1967.36~42.
[4] DAUGHTON W J,GIVENS F L.An investigation of the thickness variation of spun-on thin films commonly associated with the semiconductor industry[J].J Electrochem Soc,1982,129:173~179.
[5] LAI J H.An investigation of spin coating of electron resists[J].Polym Engng Sci,1979,19:1117~1121.
[6] SPANGLER L L,TORKELSON J M,ROYAL J S.Influence of solvent and molecular weight on thickness and surface topography of spin-coated polymer films[J].Polym Engng Sci,1990,30:644~653.