[1] SOHN Y J, QUINTANILHA R, BARNES B M, et al. 193nm angle-resolved scatterfield microscope for semiconductor metrology[J].Proceedings of the SPIE,2009,7405:74050R.
[2] SOHN Y J, QUINTANILHA R, HOWARD L, et al. Analysis of K hler illumination for 193nm scatterfield microscope[J].Proceedings of the SPIE,2009,7272:72723T.
[3] QUINTANILHA R, SOHN Y, BARNES B M, et al. Critical dimension measurements using a 193nm scatterfield microscope[J].Proceedings of the SPIE,2009,7390:73900S.
[4] BARNES B M, PATRICK H J, BISHOP M R, et al. Optical critical dimension measurement of silicon grating targets using back focal plane scatterfield microscopy[J]. Journal of Micro/Nanolithography, MEMS, and MOEMS, 2008, 7(1):013012.
[5] PATRICK H J, ATTOTA R, BARNES B M, et al. Scatterfield microscopy using back focal plane imaging with an engineered illumination field[J].Proceedings of the SPIE,2006,6152:61520J.
[6] SHYU D M, KU Y Sh, HSU W T. Angle-resolved scatterfield microscope for linewidth[J].Proceedings of the SPIE,2009,7272:72721L.
[7] HSU W T, KU Y Sh, SHYU D M. A novel method for overlay measurement by Scatterometry[J].Proceedings of the SPIE,2009,7432:74320F.
[8] MA Y.Implementation and application of rigorous coupled wave analysis in opticalscatterometry[D].Wuhan:Huazhong University of Science and Technology,2012:8-17(in Chinese).
[9] CHEN D W.Rigorous coupled-wave analysis method for diffractive optics[D].Hefei:University of Science and Technology of China,2004:8-22(in Chinese).
[10] MOHARAM M G, POMMET D A, GRANN E B, et al.Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings enhanced transmittance matrix approach[J]. Journal of the Optical Society of America,1995,12(5):1077-1086.
[11] MOHARAM M G, GRANN E B, POMMET D A, et al.Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings[J]. Journal of the Optical Society of America,1995,12(5):1068-1076.
[12] LI L F. Use of Fourier series in the analysis of discontinuous periodic structures[J]. Journal of the Optical Society of America,1996,13(9):1870-1876.
[13] CAI T, SANG T, ZHAO H.Coupled-wave analysis, numerical calculation and discussion for diffraction properties of grating[J].Opto-Electronic Engineering, 2010,37(4):141-146(in Chinese).
[14] LIU Q, WU J H. Analysis and comparison of the scalar diffraction theory and coupled-wave theory about grating[J].Laser Journal,2004,25(2):31-34(in Chinese).
[15] YIN Q Y, WU J H, QIAN G L, et al. Comparison of approximation between rigorous coupled-wavetheory and Kogelnik's coupled wave theory[J].Optics Optoelectronic Technology,2008,6(4):25-28(in Chinese).