SNSPD二十年：回顾与展望

胡小龙; 胡南; 邹锴; 孟赟; 许亮; 冯一帆; 胡小龙; 胡南; 邹锴; 孟赟; 许亮; 冯一帆

doi:10.7510/jgjs.issn.1001-3806.2022.01.001

[1]

GOL'TSMAN G N, OKUNEV O, CHULKOVA G, et al. Picosecond superconducting single-photon optical detector[J]. Applied Physics Letters, 2001, 79(6): 705-707. doi: 10.1063/1.1388868

[2]

MARSILI F, VERMA V B, STERN J A, et al. Detecting single infrared photons with 93% system efficiency[J]. Nature Photonics, 2013, 7(3): 210-214. doi: 10.1038/nphoton.2013.13

[3]

ZHANG W J, YOU L X, LI H, et al. NbN superconducting nanowire single photon detector with efficiency over 90% at 1550nm wavelength operational at compact cryocooler temperature[J]. Science China Physics, Mechanics & Astronomy, 2017, 60(12): 120314.

[4]

ESMAEIL ZADEH I, LOS J W N, GOURGUES R B M, et al. Single-photon detectors combining high efficiency, high detection rates, and ultra-high timing resolution[J]. APL Photonics, 2017, 2(11): 111301. doi: 10.1063/1.5000001

[5]

REDDY D V, NEREM R R, LITA A E, et al. Exceeding 95% system efficiency within the telecom C-band in superconducting nanowire single photon detectors[C]//Conference on Lasers and Electro-Optics (2019). Washington DC, USA: Optical Society of America, 2019: FF1A. 3.

[6]

HU P, LI H, YOU L X, et al. Detecting single infrared photons toward optimal system detection efficiency[J]. Optics Express, 2020, 28(24): 36884-36891. doi: 10.1364/OE.410025

[7]

MENG Y, ZOU K, HU N, et al. Fractal superconducting nanowires detect infrared single photons with 91% polarization-independent system efficiency and 19ps timing resolution[J/OL]. [2021-11-01]. https://arxiv.org/abs/2012.06730.

[8]

REDDY D V, NEREM R R, NAM S W, et al. Superconducting nanowire single-photon detectors with 98% system detection efficiency at 1550nm[J]. Optica, 2020, 7(12): 1649-1653. doi: 10.1364/OPTICA.400751

[9]

CHANG J, LOS J W N, TENORIO-PEARL J O, et al. Detecting telecom single photons with 99.5(-2.07+0.5)% system detection efficiency and high time resolution[J]. APL Photonics, 2021, 6(3): 036114. doi: 10.1063/5.0039772

[10]

WOLLMAN E E, VERMA V B, BEYER A D, et al. UV superconducting nanowire single-photon detectors with high efficiency, low noise, and 4K operating temperature[J]. Optics Express, 2017, 25(22): 26792. doi: 10.1364/OE.25.026792

[11]

KORZH B, ZHAO Q Y, ALLMARAS J P, et al. Demonstration of sub-3ps temporal resolution with a superconducting nanowire single-photon detector[J]. Nature Photonics, 2020, 14(4): 250-255. doi: 10.1038/s41566-020-0589-x

[12]

MVNZBERG J, VETTER A, BEUTEL F, et al. Superconducting nanowire single-photon detector implemented in a 2D photonic crystal cavity[J]. Optica, 2018, 5(5): 658-665. doi: 10.1364/OPTICA.5.000658

[13]

ZHANG J, BOIADJIEVA N, CHULKOVA G, et al. Noninvasive CMOS circuit testing with NbN superconducting single-photon detectors[J]. Electronics Letters, 2003, 39(14): 1086-1088. doi: 10.1049/el:20030710

[14]

HADFIELD R H, HABIF J L, SCHLAFER J, et al. Quantum key distribution at 1550nm with twin superconducting single-photon detectors[J]. Applied Physics Letters, 2006, 89(24): 241129. doi: 10.1063/1.2405870

[15]

KHATRI F I, ROBINSON B S, SEMPRUCCI M D, et al. Lunar laser communication demonstration operations architecture[J]. Acta Astronautica, 2015, 111: 77-83. doi: 10.1016/j.actaastro.2015.01.023

[16]

ZHONG H S, WANG H, DENG Y H, et al. Quantum computational advantage using photons[J]. Science, 2020, 370(6523): 1460-1463. doi: 10.1126/science.abe8770

[17]

ZHU J, CHEN Y J, ZHANG L B, et al. Demonstration of measuring sea fog with an SNSPD-based Lidar system[J]. Scientific Reports, 2017, 7(1): 15113. doi: 10.1038/s41598-017-15429-y

[18]

LI H, CHEN S J, YOU L X, et al. Superconducting nanowire single photon detector at 532nm and demonstration in satellite laser ranging[J]. Optics Express, 2016, 24(4): 3535. doi: 10.1364/OE.24.003535

[19]

TAYLOR G G, MOROZOV D, GEMMELL N R, et al. Photon counting LIDAR at 2.3μm wavelength with superconducting nanowires[J]. Optics Express, 2019, 27(26): 38147. doi: 10.1364/OE.27.038147

[20]

ZHANG B, GUAN Y Q, XIA L H, et al. An all-day lidar for detecting soft targets over 100km based on superconducting nanowire single-photon detectors[J]. Superconductor Science and Technology, 2021, 34(3): 034005. doi: 10.1088/1361-6668/abd576

[21]

TAYLOR G G, McCARTHY A, KORZH B, et al. Long-range depth imaging with 13ps temporal resolution using a superconducting nanowire singlephoton detector[C]//Conference on Lasers and Electro-Optics. Washington DC, USA: Optical Society of America, 2020: SM2M. 6.

[22]

HADFIELD R H. Single-photon detectors for optical quantum information applications[J]. Nature Photonics, 2009, 3(12): 696-705. doi: 10.1038/nphoton.2009.230

[23]

NATARAJAN C M, TANNER M G, HADFIELD R H. Superconducting nanowire single-photon detectors: Physics and applications[J]. Superconductor Science and Technology, 2012, 25(6): 063001. doi: 10.1088/0953-2048/25/6/063001

[24]

DAULER E A, GREIN M E, KERMAN A J, et al. Review of superconducting nanowire single-photon detector system design options and demonstrated performance[J]. Optical Engineering, 2014, 53(8): 081907. doi: 10.1117/1.OE.53.8.081907

[25]

YOU L X. Recent progress on superconducting nanowire single photon detector[J]. Chinese Science: Information Science, 2014, 44 (3): 370-388(in Chinese).

[26]

ENGEL A, RENEMA J J, IL'IN K, et al. Detection mechanism of superconducting nanowire single-photon detectors[J]. Superconductor Science and Technology, 2015, 28(11): 114003. doi: 10.1088/0953-2048/28/11/114003

[27]

HU X L, CHENG Y H, GU Ch, et al. Superconducting nanowire single-photon detectors: Recent progress[J]. Science Bulletin, 2015, 60(23): 1980-1983. doi: 10.1007/s11434-015-0960-3

[28]

HADFIELD R H, JOHANSSON G. Cham Superconducting devices in quantum optics[M]. Berlin, Germany: Springer International Publishing, 2016.

[29]

YAMASHITA T, MIKI S, TERAI H. Recent progress and application of superconducting nanowire single-photon detectors[J]. IEICE Transactions on Electronics, 2017, E100-C(3): 274-282. doi: 10.1587/transele.E100.C.274

[30]

YOU L X. Status and prospect of superconducting nanowire single photon detection[J]. Infrared and Laser Engineering, 2018, 47 (12): 1202001(in Chinese). doi: 10.3788/IRLA201847.1202001

[31]

FERRARI S, SCHUCK C, PERNICE W. Waveguide-integrated superconducting nanowire single-photon detectors[J]. Nanophotonics, 2018, 7(11): 1725-1758. doi: 10.1515/nanoph-2018-0059

[32]

HOLZMAN I, IVRY Y. Superconducting nanowires for single-photon detection: Progress, challenges, and opportunities[J]. Advanced Quantum Technologies, 2019, 2(3/4): 1800058.

[33]

HU X L, ZOU K, HU N, et al. Timing properties of superconducting nanowire single-photon detectors[C]//Quantum Optics and Photon Counting 2019. Prague, Czech Republic: SPIE, 2019: 1102704.

[34]

YOU L X. Superconducting nanowire single-photon detectors for quantum information[J]. Nanophotonics, 2020, 9(9): 2673-2692. doi: 10.1515/nanoph-2020-0186

[35]

POLAKOVIC T, ARMSTRONG W, KARAPETROV G, et al. Unconventional applications of superconducting nanowire single photon detectors[J]. Nanomaterials, 2020, 10(6): 1198. doi: 10.3390/nano10061198

[36]

ESMAEIL ZADEH I, CHANG J, LOS J W N, et al. Superconducting nanowire single-photon detectors: A perspective on evolution, state-of-the-art, future developments, and applications[J]. Applied Physics Letters, 2021, 118(19): 190502. doi: 10.1063/5.0045990

[37]

STEINHAUER S, GYGER S, ZWILLER V. Progress on large-scale superconducting nanowire single-photon detectors[J]. Applied Physics Letters, 2021, 118(10): 100501. doi: 10.1063/5.0044057

[38]

SHIBATA H. Review of superconducting nanostrip photon detectors using various superconductors[J]. IEICE Transactions on Electronics, 2021, E104-C(9): 429-434. doi: 10.1587/transele.2020SUI0001

[39]

CHEN J P, ZHANG C, LIU Y, et al. Sending-or-not-sending with independent lasers: Secure twin-field quantum key distribution over 509km[J]. Physical Review Letters, 2020, 124(7): 070501. doi: 10.1103/PhysRevLett.124.070501

[40]

FANG X T, ZENG P, LIU H, et al. Implementation of quantum key distribution surpassing the linear rate-transmittance bound[J]. Nature Photonics, 2020, 14(7): 422-425. doi: 10.1038/s41566-020-0599-8

[41]

ZHAO Q Y, ZHU D, CALANDRI N, et al. Single-photon imager based on a superconducting nanowire delay line[J]. Nature Photonics, 2017, 11(4): 247-251. doi: 10.1038/nphoton.2017.35

[42]

SUN X Q, ZHANG W J, ZHANG C J, et al. Polarization resolving and imaging with a single-photon sensitive superconducting nanowire array[J]. Optics Express, 2021, 29(7): 11021. doi: 10.1364/OE.419627

[43]

CHEN S J, LIU D K, ZHANG W X, et al. Time-of-flight laser ranging and imaging at 1550nm using low-jitter superconducting nanowire single-photon detection system[J]. Applied Optics, 2013, 52(14): 3241. doi: 10.1364/AO.52.003241

[44]

YU J, ZHANG R L, GAO Y F, et al. Intravital confocal fluorescence lifetime imaging microscopy in the second near-infrared window[J]. Optics Letters, 2020, 45(12): 3305. doi: 10.1364/OL.394684

[45]

LIAO J L, YIN Y X, ZHANG R L, et al. Depth-resolved NIR-Ⅱ fluorescence mesoscope[J]. Biomedical Optics Express, 2020, 11(5): 2366-2372. doi: 10.1364/BOE.386692

[46]

McCARTHY A, KRICHEL N J, GEMMELL N R, et al. Kilometer-range, high resolution depth imaging via 1560nm wavelength single-photon detection[J]. Optics Express, 2013, 21(7): 8904-8915. doi: 10.1364/OE.21.008904

[47]

HU N, FENG Y F, XU L, et al. Photon-counting LIDAR based on a fractal SNSPD[C]// Optical Fiber Communication Conference (OFC) 2021. Washington D C, USA: Optical Society of America, 2021: Tu5E. 4.

[48]

WOLLMAN E E, VERMA V B, LITA A E, et al. Kilopixel array of superconducting nanowire single-photon detectors[J]. Optics Express, 2019, 27(24): 35279-35289. doi: 10.1364/OE.27.035279

[49]

CHENG R, ZOU C L, GUO X, et al. Broadband on-chip single-photon spectrometer[J]. Nature Communications, 2019, 10(1): 4104. doi: 10.1038/s41467-019-12149-x

[50]

KOVALYUK V, KAHL O, FERRARI S, et al. On-chip single-photon spectrometer for visible and infrared wavelength range[J]. Journal of Physics: Conference Series, 2018, 1124(5): 051045. doi: 10.1088/1742-6596/1124/5/051045/pdf

[51]

GEMMELL N R, McCARTHY A, LIU B, et al. Singlet oxygen luminescence detection with a fiber-coupled superconducting nanowire single-photon detector[J]. Optics Express, 2013, 21(4): 5005-5013. doi: 10.1364/OE.21.005005

[52]

ZHONG T, HU X L, WONG F N C, et al. High-quality fiber-optic polarization entanglement distribution at 1.3μm telecom wavelength[J]. Optics Letters, 2010, 35(9): 1392. doi: 10.1364/OL.35.001392

[53]

TOOMEY E, SEGALL K, BERGGREN K K. Design of a power efficient artificial neuron using superconducting nanowires[J]. Frontiers in Neuroscience, 2019, 13: 933. doi: 10.3389/fnins.2019.00933

[54]

TOOMEY E, SEGALL K, CASTELLANI M, et al. Superconducting nanowire spiking element for neural networks[J]. Nano Letters, 2020, 20(11): 8059-8066. doi: 10.1021/acs.nanolett.0c03057

[55]

MIKI S, TAKEDA M, FUJIWARA M, et al. Superconducting NbTiN nanowire single photon detectors with low kinetic inductance[J]. Applied Physics Express, 2009, 2: 075002. doi: 10.1143/APEX.2.075002

[56]

MENG Y, ZOU K, HU N, et al. Fractal superconducting nanowire avalanche photodetector at 1550nm with 60% system detection efficiency and 1.05 polarization sensitivity[J]. Optics Letters, 2020, 45(2): 471-474. doi: 10.1364/OL.377228

[57]

XU G Zh, ZHANG W J, YOU L X, et al. Superconducting microstrip single-photon detector with system detection efficiency over 90% at 1550nm[J]. Photonics Research, 2021, 9(6): 958-967. doi: 10.1364/PRJ.419514

[58]

HOCHBERG Y, CHARAEV I, NAM S W, et al. Detecting sub-GeV dark matter with superconducting nanowires[J]. Physical Review Letters, 2019, 123(15): 151802. doi: 10.1103/PhysRevLett.123.151802

[59]

VERMA V B, KORZH B, WALTER A B, et al. Single-photon detection in the mid-infrared up to 10μm wavelength using tungsten silicide superconducting nanowire detectors[J]. APL Photonics, 2021, 6(5): 056101. doi: 10.1063/5.0048049

[60]

ROSFJORD K M, YANG J K W, DAULER E A, et al. Nanowire single-photon detector with an integrated optical cavity and anti-reflection coating[J]. Optics Express, 2006, 14(2): 527. doi: 10.1364/OPEX.14.000527

[61]

HU X L, ZHONG T, WHITE J E, et al. Fiber-coupled nanowire photon counter at 1550nm with 24% system detection efficiency[J]. Optics Letters, 2009, 34(23): 3607-3609. doi: 10.1364/OL.34.003607

[62]

SEMENOV A, GVNTHER B, BÖTTGER U, et al. Optical and transport properties of ultrathin NbN films and nanostructures[J]. Physical Review B, 2009, 80(5): 054510. doi: 10.1103/PhysRevB.80.054510

[63]

HENRICH D, DÖRNER S, HOFHERR M, et al. Broadening of hot-spot response spectrum of superconducting NbN nanowire single-photon detector with reduced nitrogen content[J]. Journal of Applied Physics, 2012, 112(7): 074511. doi: 10.1063/1.4757625

[64]

MIKI S, FUJIWARA M, SASAKI M, et al. Large sensitive-area NbN nanowire superconducting single-photon detectors fabricated on single-crystal MgO substrates[J]. Applied Physics Letters, 2008, 92(6): 061116. doi: 10.1063/1.2870099

[65]

IVRY Y, KIM C S, DANE A E, et al. Universal scaling of the critical temperature for thin films near the superconducting-to-insulating transition[J]. Physical Review B, 2014, 90(21): 214515. doi: 10.1103/PhysRevB.90.214515

[66]

PAN Y M, ZHOU H, ZHANG L, et al. Superconducting nanowire single-photon detector made of ultrathin γ-Nb₄N₃ film for mid-infrared wavelengths[J]. Superconductor Science and Technology, 2021, 34(7): 074001. doi: 10.1088/1361-6668/abf851

[67]

AKHLAGHI M K, SCHELEW E, YOUNG J F. Waveguide integrated superconducting single-photon detectors implemented as near-perfect absorbers of coherent radiation[J]. Nature Communications, 2015, 6(1): 8233. doi: 10.1038/ncomms9233

[68]

YAMASHITA T, MIKI S, MAKISE K, et al. Origin of intrinsic dark count in superconducting nanowire single-photon detectors[J]. Applied Physics Letters, 2011, 99(16): 161105. doi: 10.1063/1.3652908

[69]

BULAEVSKⅡ L N, GRAF M J, KOGAN V G. Vortex-assisted photon counts and their magnetic field dependence in single-photon superconducting detectors[J]. Physical Review B, 2012, 85(1): 014505. doi: 10.1103/PhysRevB.85.014505

[70]

YAMASHITA T, MIKI S, QIU W, et al. Temperature dependent performances of superconducting nanowire single-photon detectors in an ultralow-temperature region[J]. Applied Physics Express, 2010, 3(10): 102502. doi: 10.1143/APEX.3.102502

[71]

YANG X Y, LI H, ZHANG W J, et al. Superconducting nanowire single photon detector with on-chip bandpass filter[J]. Optics Express, 2014, 22(13): 16267-16272. doi: 10.1364/OE.22.016267

[72]

SEMENOV A, ENGEL A, HVBERS H W, et al. Spectral cut-off in the efficiency of the resistive state formation caused by absorption of a single-photon in current-carrying superconducting nano-strips[J]. The European Physical Journal, 2005, B47(4): 495-501.

[73]

BULAEVSKⅡ L N, GRAF M J, BATISTA C D, et al. Vortex-induced dissipation in narrow current-biased thin-film superconducting strips[J]. Physical Review B, 2011, 83(14): 144526. doi: 10.1103/PhysRevB.83.144526

[74]

ENGEL A, LONSKY J, ZHANG X, et al. Detection mechanism in SNSPD: Numerical results of a conceptually simple, yet powerful detection model[J]. IEEE Transactions on Applied Superconductivity, 2015, 25(3): 2200407.

[75]

VODOLAZOV D Y. Single-photon detection by a dirty current-carrying superconducting strip based on the kinetic-equation approach[J]. Physical Review Applied, 2017, 7(3): 034014. doi: 10.1103/PhysRevApplied.7.034014

[76]

YANG J K W, KERMAN A J, DAULER E A, et al. Modeling the electrical and thermal response of superconducting nanowire single-photon detectors[J]. IEEE Transactions on Applied Superconductivity, 2007, 17(2): 581-585. doi: 10.1109/TASC.2007.898660

[77]

KERMAN A J, YANG J K W, MOLNAR R J, et al. Electrothermal feedback in superconducting nanowire single-photon detectors[J]. Physical Review B, 2009, 79(10): 100509. doi: 10.1103/PhysRevB.79.100509

[78]

ZHAO Q Y. High-speed and spatially-resolved superconducting single-photon detection system and its applications[D]. Nanjing: Nanjing University, 2014: 32-38(in Chinese).

[79]

KORNEEVA Y P, VODOLAZOV D Y, SEMENOV A V, et al. Optical single-photon detection in micrometer-scale NbN bridges[J]. Physical Review Applied, 2018, 9(6): 064037. doi: 10.1103/PhysRevApplied.9.064037

[80]

RENEMA J J, GAUDIO R, WANG Q, et al. Experimental test of theories of the detection mechanism in a nanowire superconducting single photon detector[J]. Physical Review Letters, 2014, 112(11): 117604. doi: 10.1103/PhysRevLett.112.117604

[81]

CHEN S J, YOU L X, ZHANG W J, et al. Dark counts of superconducting nanowire single-photon detector under illumination[J]. Optics Express, 2015, 23(8): 10786. doi: 10.1364/OE.23.010786

[82]

DORENBOS S N, REIGER E M, AKOPIAN N, et al. Superconducting single photon detectors with minimized polarization dependence[J]. Applied Physics Letters, 2008, 93(16): 161102. doi: 10.1063/1.3003579

[83]

ANANT V. Engineering the optical properties of subwavelength devices and materials[D]. Cambridge, USA: Massachusetts Institute of Technology, 2007.

[84]

VERMA V B, MARSILI F, HARRINGTON S, et al. A three-dimensional, polarization-insensitive superconducting nanowire avalanche photodetector[J]. Applied Physics Letters, 2012, 101(25): 251114. doi: 10.1063/1.4768788

[85]

HUANG J, ZHANG W J, YOU L X, et al. Spiral superconducting nanowire single-photon detector with efficiency over 50% at 1550nm wavelength[J]. Superconductor Science and Technology, 2017, 30(7): 074004. doi: 10.1088/1361-6668/aa6d03

[86]

ZHU X T, GU Ch, CHENG Y H, et al. Broadband, polarization-insensitive superconducting single-photon detectors based on waveguide-integrated ultra-narrow nanowires[C]//2015 Opto-Electronics and Communications Conference (OECC). New York, USA: IEEE, 2015: JThE. 14.

[87]

TÓTH B, SZENES A, MARÁCZI D, et al. Polarization independent high absorption efficiency single-photon detectors based on three-dimensional integrated superconducting and plasmonic patterns[J]. IEEE Journal of Selected Topics in Quantum Electronics, 2020, 26(3): 3900309.

[88]

ZHANG W Y, HU P, XIAO Y, et al. High efficiency, polarization-insensitivity superconducting single photon detector[J]. Acta physica Sinica, 2021, 70(18): 188501(in Chinese). doi: 10.7498/aps.70.20210486

[89]

XU R Y, ZHENG F, QIN D F, et al. Demonstration of polarization-insensitive superconducting nanowire single-photon detector with Si compensation layer[J]. Journal of Lightwave Technology, 2017, 35(21): 4707-4713. doi: 10.1109/JLT.2017.2752807

[90]

GUO Q, LI H, YOU L X, et al. Single photon detector with high polarization sensitivity[J]. Scientific Reports, 2015, 5(1): 9616. doi: 10.1038/srep09616

[91]

XU R Y, LI Y Ch, ZHENG F, et al. Demonstration of a superconducting nanowire single photon detector with an ultrahigh polarization extinction ratio over 400[J]. Optics Express, 2018, 26(4): 3947-3955. doi: 10.1364/OE.26.003947

[92]

LI D Zh, JIAO R Zh. Design of a low-filling-factor and polarization-sensitive superconducting nanowire single photon detector with high detection efficiency[J]. Photonics Research, 2019, 7(8): 847-852. doi: 10.1364/PRJ.7.000847

[93]

YANG M M, ZHENG F, JIN B B, et al. An efficient and polarization-sensitive superconducting-nanowire single-photon detector with coupled asymmetric split-ring resonator-loaded cavity[J]. IEEE Transactions on Applied Superconductivity, 2016, 26(7): 2200604.

[94]

CSETE M, SZENES A, MARÁCZI D, et al. Plasmonic structure integrated single-photon detectors optimized to maximize polarization contrast[J]. IEEE Photonics Journal, 2017, 9(2): 4900211.

[95]

GUO Q, YOU L X, LI H, et al. Impact of trapezoidal cross section on polarization sensitivity of SNSPD with ultranarrow nanowire[J]. IEEE Transactions on Applied Superconductivity, 2017, 27(4): 2201304.

[96]

SHIBATA H, FUKAO K, KIRIGANE N, et al. SNSPD with ultimate low system dark count rate using various cold filters[J]. IEEE Transactions on Applied Superconductivity, 2017, 27(4): 2200504.

[97]

MARSILI F, NAJAFI F, DAULER E, et al. Afterpulsing and instability in supercon-ducting nanowire avalanche photodetectors[J]. Applied Physics Letters, 2012, 100(11): 112601. doi: 10.1063/1.3691944

[98]

KERMAN A J, DAULER E A, KEICHER W E, et al. Kinetic-inductance-limited reset time of superconducting nanowire photon counters[J]. Applied Physics Letters, 2006, 88(11): 111116. doi: 10.1063/1.2183810

[99]

AUTEBERT C, GRAS G, AMRI E, et al. Direct measurement of the recovery time of superconducting nanowire single-photon detectors[J]. Journal of Applied Physics, 2020, 128(7): 074504. doi: 10.1063/5.0007976

[100]

ZHAO Q, ZHANG L, JIA T, et al. Intrinsic timing jitter of superconducting nanowire single-photon detectors[J]. Applied Physics B, 2011, 104(3): 673-678. doi: 10.1007/s00340-011-4574-4

[101]

CALANDRI N, ZHAO Q Y, ZHU D, et al. Superconducting nanowire detector jitter limited by detector geometry[J]. Applied Physics Letters, 2016, 109(15): 152601. doi: 10.1063/1.4963158

[102]

WU H, GU Ch, CHENG Y, et al. Vortex-crossing-induced timing jitter of superconducting nanowire single-photon detectors[J]. Applied Physics Letters, 2017, 111(6): 062603. doi: 10.1063/1.4997930

[103]

WU J J, YOU L X, CHEN S J, et al. Improving the timing jitter of a superconducting nanowire single-photon detection system[J]. Applied Optics, 2017, 56(8): 2195-2200. doi: 10.1364/AO.56.002195

[104]

KOZOREZOV A G, LAMBERT C, MARSILI F, et al. Fano fluctuations in superconducting-nanowire single-photon detectors[J]. Physical Review B, 2017, 96(5): 054507. doi: 10.1103/PhysRevB.96.054507

[105]

CHENG Y H, GU Ch, HU X L. Inhomogeneity-induced timing jitter of superconducting nanowire single-photon detectors[J]. Applied Physics Letters, 2017, 111(6): 062604. doi: 10.1063/1.4985226

[106]

ALLMARAS J P, KOZOREZOV A G, KORZH B A, et al. Intrinsic timing jitter and latency in superconducting nanowire single-photon detectors[J]. Physical Review Applied, 2019, 11(3): 034062. doi: 10.1103/PhysRevApplied.11.034062

[107]

JAHANI S, YANG L P, BUGANZA TEPOLE A, et al. Probabilistic vortex crossing criterion for superconducting nanowire single-photon detectors[J]. Journal of Applied Physics, 2020, 127(14): 143101. doi: 10.1063/1.5132961

[108]

SULTANA N. Single-photon detectors for satellite based quantum communications[D]. Waterloo, Canada: The University of Waterloo, 2020.

[109]

GEMMELL N R, HILLS M, BRADSHAW T, et al. A miniaturized 4K platform for superconducting infrared photon counting detectors[J]. Superconductor Science and Technology, 2017, 30(11): 11LT01.

[110]

KOTSUBO V, RADEBAUGH R, HENDERSHOTT P, et al. Compact 2.2K cooling system for superconducting nanowire single photon detectors[J]. IEEE Transactions on Applied Superconductivity, 2017, 27(4): 500405.

[111]

YOU L X, QUAN J, WANG Y, et al. Superconducting nanowire single photon detection system for space applications[J]. Optics Express, 2018, 26(3): 2965-2971. doi: 10.1364/OE.26.002965

[112]

DANG H Zh, ZHANG T, ZHA R, et al. Development of 2-K space cryocoolers for cooling the superconducting nanowire single photon detector[J]. IEEE Transactions on Applied Superconductivity, 2019, 29(5): 2200904.

[113]

CALOZ M, KORZH B, RAMIREZ E, et al. Intrinsically-limited timing jitter in molybdenum silicide superconducting nanowire single-photon detectors[J]. Journal of Applied Physics, 2019, 126(16): 164501. doi: 10.1063/1.5113748

[114]

ESMAEIL ZADEH I, LOS J W N, GOURGUES R B M, et al. Efficient single-photon detection with 7.7ps time resolution for photon-correlation measurements[J]. ACS Photonics, 2020, 7(7): 1780-1787. doi: 10.1021/acsphotonics.0c00433

[115]

TINKHAM M. Introduction to superconductivity[M]. New York, USA: Dover Publications, 2004.

[116]

ZHAO Q Y, SANTAVICCA D F, ZHU D, et al. A distributed electrical model for superconducting nanowire single photon detectors[J]. Applied Physics Letters, 2018, 113(8): 082601. doi: 10.1063/1.5040150

[117]

CLEM J R, BERGGREN K K. Geometry-dependent critical currents in superconducting nanocircuits[J]. Physical Review B, 2011, 84(17): 174510. doi: 10.1103/PhysRevB.84.174510

[118]

YANG J K W, KERMAN A J, DAULER E A, et al. Suppressed critical current in superconducting nanowire single-photon detectors with high fill-factors[J]. IEEE Transactions on Applied Superconductivity, 2009, 19(3): 318-322. doi: 10.1109/TASC.2009.2017953

[119]

MURPHY A, SEMENOV A, KORNEEV A, et al. Three temperature regimes in superconducting photon detectors: Quantum, thermal and multiple phase-slips as generators of dark counts[J]. Scientific Reports, 2015, 5(1): 10174. doi: 10.1038/srep10174

[120]

VEREVKIN A, ZHANG J, SOBOLEWSKI R, et al. Detection efficiency of large-active-area NbN single-photon superconducting detectors in the ultraviolet to near-infrared range[J]. Applied Physics Letters, 2002, 80(25): 4687-4689. doi: 10.1063/1.1487924

[121]

RENEMA J J, FRUCCI G, ZHOU Z, et al. Modified detector tomography technique applied to a superconducting multiphoton nanodetector[J]. Optics Express, 2012, 20(3): 2806. doi: 10.1364/OE.20.002806

[122]

RENEMA J J, FRUCCI G, ZHOU Z, et al. Universal response curve for nanowire superconducting single-photon detectors[J]. Physical Review B, 2013, 87(17): 174526. doi: 10.1103/PhysRevB.87.174526

[123]

ENGEL A, SCHILLING A. Numerical analysis of detection-mechanism models of superconducting nanowire single-photon detector[J]. Journal of Applied Physics, 2013, 114(21): 214501. doi: 10.1063/1.4836878

[124]

ZOTOVA A N, VODOLAZOV D Y. Photon detection by current-carrying superconducting film: A time-dependent Ginzburg-Landau approach[J]. Physical Review B, 2012, 85(2): 024509. doi: 10.1103/PhysRevB.85.024509

[125]

VODOLAZOV D Y. Current dependence of the red boundary of superconducting single-photon detectors in the modified hot-spot model[J]. Physical Review B, 2014, 90(5): 054515. doi: 10.1103/PhysRevB.90.054515

[126]

ZOTOVA A N, VODOLAZOV D Y. Intrinsic detection efficiency of superconducting nanowire single photon detector in the modified hot spot model[J]. Superconductor Science and Technology, 2014, 27(12): 125001. doi: 10.1088/0953-2048/27/12/125001

[127]

VODOLAZOV D Y, KORNEEVA Y P, SEMENOV A V, et al. Vortex-assisted mechanism of photon counting in a superconducting nanowire single-photon detector revealed by external magnetic field[J]. Physical Review B, 2015, 92(10): 104503. doi: 10.1103/PhysRevB.92.104503

[128]

LUSCHE R, SEMENOV A, ILIN K, et al. Effect of the wire width on the intrinsic detection efficiency of superconducting-nanowire single-photon detectors[J]. Journal of Applied Physics, 2014, 116(4): 043906. doi: 10.1063/1.4891105

[129]

ENGEL A, AESCHBACHER A, INDERBITZIN K, et al. Tantalum nitride superconducting single-photon detectors with low cut-off energy[J]. Applied Physics Letters, 2012, 100(6): 062601. doi: 10.1063/1.3684243

[130]

RENEMA J J, WANG Q, GAUDIO R, et al. Position-dependent local detection efficiency in a nanowire superconducting single-photon detector[J]. Nano Letters, 2015, 15(7): 4541-4545. doi: 10.1021/acs.nanolett.5b01103

[131]

BERGGREN K K, ZHAO Q Y, ABEBE N, et al. A superconducting nanowire can be modeled by using SPICE[J]. Superconductor Science and Technology, 2018, 31(5): 055010. doi: 10.1088/1361-6668/aab149

[132]

FANO U. Ionization yield of radiations. Ⅱ. the fluctuations of the number of ions[J]. Physical Review, 1947, 72(1): 26-29. doi: 10.1103/PhysRev.72.26

[133]

VODOLAZOV D Y. Minimal timing jitter in superconducting nanowire single-photon detectors[J]. Physical Review Applied, 2019, 11(1): 014016. doi: 10.1103/PhysRevApplied.11.014016

[134]

EJRNAES M, PARLATO L, ARPAIA R, et al. Observation of dark pulses in 10nm thick YBCO nanostrips presenting hysteretic current voltage characteristics[J]. Superconductor Science and Technology, 2017, 30(12): 12LT02. doi: 10.1088/1361-6668/aa94b9

[135]

XING X, BALASUBRAMANIAN K, BOUSCHER S, et al. Photoresponse above 85K of selective epitaxy grown high-Tc superconducting microwires[J]. Applied Physics Letters, 2020, 117(3): 032602. doi: 10.1063/5.0006584

[136]

SHIBATA H, KIRIGANE N, FUKAO K, et al. Photoresponse of a La_1.85Sr_0.15CuO₄ nanostrip[J]. Superconductor Science and Technology, 2017, 30(7): 074001. doi: 10.1088/1361-6668/aa6c3e

[137]

CHARPENTIER S, ARPAIA R, GAUDET J, et al. Hot spot formation in electron-doped PCCO nanobridges[J]. Physical Review B, 2016, 94(6): 060503. doi: 10.1103/PhysRevB.94.060503

[138]

SHIBATA H. Fabrication of a MgB₂ nanowire single-photon detector using Br₂-N₂ dry etching[J]. Applied Physics Express, 2014, 7(10): 103101. doi: 10.7567/APEX.7.103101

[139]

CHEREDNICHENKO S, ACHARYA N, NOVOSELOV E, et al. Low kinetic inductance superconducting MgB₂ nanowires with a 130ps relaxation time for single-photon detection applications[J]. Superconductor Science and Technology, 2021, 34(4): 044001. doi: 10.1088/1361-6668/abdeda

[140]

YUAN P Sh, XU Zh T, LI C, et al. Transport properties of ultrathin BaFe_1.84Co_0.16As₂ superconducting nanowires[J]. Superconductor Science and Technology, 2018, 31(2): 025002. doi: 10.1088/1361-6668/aa9b61

[141]

TSUJI Y, HATANO T, KONDO K, et al. Microfabrication of NdFeAs(O, F) thin films and evaluation of the transport properties[J]. Superconductor Science and Technology, 2020, 33(7): 074001. doi: 10.1088/1361-6668/ab8619

[142]

PAGANO S, MARTUCCIELLO N, ENRICO E, et al. Iron-based superconducting nanowires: Electric transport and voltage-noise properties[J]. Nanomaterials, 2020, 10(5): 862. doi: 10.3390/nano10050862

[143]

JIA X Q. Preparation, optimization and characterization of Nb based ultrathin films[D]. Nanjing: Nanjing University, 2014(in Chinese).

[144]

DANE A E. Reactive DC magnetron sputtering of ultrathin superconducting niobium nitride films[D]. Cambridge, USA: Massachusetts Institute of Technology, 2015.

[145]

ZICHI J, CHANG J, STEINHAUER S, et al. Optimizing the stoichiometry of ultrathin NbTiN films for high-performance superconducting nanowire single-photon detectors[J]. Optics Express, 2019, 27(19): 26579-26587. doi: 10.1364/OE.27.026579

[146]

GUILLET B, ARTHURSSON Ö, MÉCHIN L, et al. Properties of ultra-thin NbN films for membrane-type THz HEB[J]. Journal of Low Temperature Physics, 2008, 151(1): 570-574.

[147]

GAO J R, HAJENIUS M, TICHELAAR F D, et al. Monocrystalline NbN nanofilms on a 3C-SiC/Si substrate[J]. Applied Physics Letters, 2007, 91(6): 062504. doi: 10.1063/1.2766963

[148]

DOCHEV D, DESMARIS V, PAVOLOTSKY A, et al. Growth and characterization of epitaxial ultra-thin NbN films on 3C-SiC/Si substrate for terahertz applications[J]. Superconductor Science and Technology, 2011, 24(3): 035016. doi: 10.1088/0953-2048/24/3/035016

[149]

SHⅡNO T, SHIBA S, SAKAI N, et al. Improvement of the critical temperature of superconducting NbTiN and NbN thin films using the AlN buffer layer[J]. Superconductor Science and Technology, 2010, 23(4): 045004. doi: 10.1088/0953-2048/23/4/045004

[150]

ZHANG J J, SU X, ZHANG L, et al. Improvement of the superconducting properties of NbN thin film on single-crystal silicon substrate by using a TiN buffer layer[J]. Superconductor Science and Technology, 2013, 26(4): 045010. doi: 10.1088/0953-2048/26/4/045010

[151]

CHENG R, WRIGHT J, XING H G, et al. Epitaxial niobium nitride superconducting nanowire single-photon detectors[J]. Applied Physics Letters, 2020, 117(13): 132601. doi: 10.1063/5.0018818

[152]

BANERJEE A, BAKER L J, DOYE A, et al. Characterisation of amorphous molybdenum silicide (MoSi) superconducting thin films and nanowires[J]. Superconductor Science and Technology, 2017, 30(8): 084010. doi: 10.1088/1361-6668/aa76d8

[153]

SHIBATA H, MARUYAMA T, AKAZAKI T, et al. Photon detection and fabrication of MgB₂ nanowire[J]. Physica, 2008, C468(15): 1992-1994.

[154]

CHARAEV I, CHEREDNICHENKO S, REIDY K, et al. Single-photon detection in superconducting MgB₂ micro-wires operating up to 20K[C/OL]//19th International Workshop on Low Temperature Detectors. [2021-11-01]. https://www.nist.gov/system/files/documents/2021/07/21/1td.programv1.24 abstracts CST.pdf.

[155]

YANG X, YOU L X, ZHANG L, et al. Comparison of superconducting nanowire single-photon detectors made of NbTiN and NbN thin films[J]. IEEE Transactions on Applied Superconductivity, 2018, 28(1): 2200106.

[156]

VERMA V B, KORZH B, BUSSIÈRES F, et al. High-efficiency WSi superconducting nanowire single-photon detectors operating at 2.5K[J]. Applied Physics Letters, 2014, 105(12): 122601. doi: 10.1063/1.4896045

[157]

DANE A E, McCAUGHAN A N, ZHU D, et al. Bias sputtered NbN and superconducting nanowire devices[J]. Applied Physics Letters, 2017, 111(12): 122601. doi: 10.1063/1.4990066

[158]

TREECE R E, HORWITZ J S, CLAASSEN J H, et al. Pulsed laser deposition of high-quality NbN thin films[J]. Applied Physics Letters, 1994, 65(22): 2860-2862. doi: 10.1063/1.112516

[159]

CHENG R, WANG S, TANG H X. Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN[J]. Applied Physics Letters, 2019, 115(24): 241101. doi: 10.1063/1.5131664

[160]

KNEHR E, KUZMIN A, VODOLAZOV D Y, et al. Nanowire single-photon detectors made of atomic layer-deposited niobium nitride[J]. Superconductor Science and Technology, 2019, 32(12): 125007. doi: 10.1088/1361-6668/ab48d7

[161]

LIU X, BABCOCK J R, LANE M A, et al. Plasma-assisted MOCVD growth of superconducting NbN thin films using Nb dialkylamide and Nb alkylimide precursors[J]. Chemical Vapor Deposition, 2001, 7(1): 25-28. doi: 10.1002/1521-3862(200101)7:1<25::AID-CVDE25>3.0.CO;2-O

[162]

HU X L. Efficient superconducting-nanowire single-photon detectors and their applications in quantum optics[D]. Cambridge, USA: Massachusetts Institute of Technology, 2011.

[163]

BANERJEE A, HEATH R M, MOROZOV D, et al. Optical properties of refractory metal based thin films[J]. Optical Materials Express, 2018, 8(8): 2072-2088. doi: 10.1364/OME.8.002072

[164]

BANERJEE A. Optimisation of superconducting thin film growth for next generation superconducting detector applications[D]. Glasgow: University of Glasgow, 2017.

[165]

ZHU X T. Waveguide integrated infrared superconducting nanowire single photon detector[D]. Tianjin: Tianjin University, 2017(in Chinese).

[166]

ZHANG W, JIA Q, YOU L X, et al. Saturating intrinsic detection efficiency of superconducting nanowire single-photon detectors via defect engineering[J]. Physical Review Applied, 2019, 12(4): 044040. doi: 10.1103/PhysRevApplied.12.044040

[167]

LÜ C L, ZHOU H, LI H, et al. Large active area superconducting single-nanowire photon detector with a 100μm diameter[J]. Superconductor Science and Technology, 2017, 30(11): 115018. doi: 10.1088/1361-6668/aa8e28

[168]

CHANG J, ESMAEIL ZADEH I, LOS J W N, et al. Multimode-fiber-coupled superconducting nanowire single-photon detectors with high detection efficiency and time resolution[J]. Applied Optics, 2019, 58(36): 9803-9807. doi: 10.1364/AO.58.009803

[169]

BELLEI F, CARTWRIGHT A P, McCAUGHAN A N, et al. Free-space-coupled superconducting nanowire single-photon detectors for infrared optical communications[J]. Optics Express, 2016, 24(4): 3248-3257. doi: 10.1364/OE.24.003248

[170]

CHARAEV I, SEMENOV A, DOERNER S, et al. Current dependence of the hot-spot response spectrum of superconducting single-photon detectors with different layouts[J]. Superconductor Science and Technology, 2017, 30(2): 025016. doi: 10.1088/1361-6668/30/2/025016

[171]

HENRICH D, REHM L, DÖRNER S, et al. Detection efficiency of a spiral-nanowire superconducting single-photon detector[J]. IEEE Transactions on Applied Superconductivity, 2013, 23(3): 2200405. doi: 10.1109/TASC.2013.2237936

[172]

CHARAEV I, MORIMOTO Y, DANE A, et al. Large-area microwire MoSi single-photon detectors at 1550nm wavelength[J]. Applied Physics Letters, 2020, 116(24): 242603. doi: 10.1063/5.0005439

[173]

BITAULD D, MARSILI F, GAGGERO A, et al. Nanoscale optical detector with single-photon and multiphoton sensitivity[J]. Nano Letters, 2010, 10(8): 2977-2981. doi: 10.1021/nl101411h

[174]

GU Ch, CHENG Y H, ZHU X T, et al. Fractal-inspired, polarization-insensitive superconducting nanowire single-photon detectors[C]//Advanced Photonics 2015. Boston, USA: Optical Society of American, 2015: JM3A. 10.

[175]

FAN J A, YEO W H, SU Y, et al. Fractal design concepts for stretchable electronics[J]. Nature Communications, 2014, 5(1): 3266. doi: 10.1038/ncomms4266

[176]

CHI X M, ZOU K, GU Ch, et al. Fractal superconducting nanowire single-photon detectors with reduced polarization sensitivity[J]. Optics Letters, 2018, 43(20): 5017-5020. doi: 10.1364/OL.43.005017

[177]

HU X L, HOLZWARTH C W, MASCIARELLI D, et al. Efficiently coupling light to superconducting nanowire single-photon detectors[J]. IEEE Transactions on Applied Superconductivity, 2009, 19(3): 336-340. doi: 10.1109/TASC.2009.2018035

[178]

EJRNAES M, CRISTIANO R, QUARANTA O, et al. A cascade switching superconducting single photon detector[J]. Applied Physics Letters, 2007, 91(26): 262509. doi: 10.1063/1.2828138

[179]

MURPHY R, GREIN M, GUDMUNDSEN T, et al. Saturated photon detection efficiency in NbN superconducting photon detectors[C]//CLEO: QELS_Fundamental Science 2015. San Jose, California, USA: Optical Society of American, 2015: FF2A. 3.

[180]

ZHAO Q, McCAUGHAN A N, DANE A E, et al. Eight-fold signal amplification of a superconducting nanowire single-photon detector using a multiple-avalanche architecture[J]. Optics Express, 2014, 22(20): 24574-24581. doi: 10.1364/OE.22.024574

[181]

CHENG Y H, LIU H Y, GU Ch, et al. Superconducting nanowire single-photon detectors integrated with current reservoirs[C]//Conference on Lasers and Electro-Optics (2017). Washington DC, USA: Optical Society of America, 2017: JW2A. 120.

[182]

BAEK B, STERN J A, NAM S W. Superconducting nanowire single-photon detector in an optical cavity for front-side illumination[J]. Applied Physics Letters, 2009, 95(19): 191110. doi: 10.1063/1.3263715

[183]

LI H, WANG H, YOU L X, et al. Multispectral superconducting nanowire single photon detector[J]. Optics Express, 2019, 27(4): 4727-4733. doi: 10.1364/OE.27.004727

[184]

HU X L, DAULER E A, MOLNAR R J, et al. Superconducting nanowire single-photon detectors integrated with optical nano-antennae[J]. Optics Express, 2011, 19(1): 17-31. doi: 10.1364/OE.19.000017

[185]

HEATH R M, TANNER M G, DRYSDALE T D, et al. Nanoantenna enhancement for telecom-wavelength superconducting single photon detectors[J]. Nano Letters, 2015, 15(2): 819-822. doi: 10.1021/nl503055a

[186]

YOU L X, WU J, XU Y, et al. Microfiber-coupled superconducting nanowire single-photon detector for near-infrared wavelengths[J]. Optics Express, 2017, 25(25): 31221-31229. doi: 10.1364/OE.25.031221

[187]

HOU X T, YAO N, YOU L X, et al. Ultra-broadband microfiber-coupled superconducting single-photon detector[J]. Optics Express, 2019, 27(18): 25241. doi: 10.1364/OE.27.025241

[188]

VETTER A, FERRARI S, RATH P, et al. Cavity-enhanced and ultrafast superconducting single-photon detectors[J]. Nano Letters, 2016, 16(11): 7085-7092. doi: 10.1021/acs.nanolett.6b03344

[189]

KHASMINSKAYA S, PYATKOV F, SŁOWIK K, et al. Fully integrated quantum photonic circuit with an electrically driven light source[J]. Nature Photonics, 2016, 10(11): 727-732. doi: 10.1038/nphoton.2016.178

[190]

KANIBER M, FLASSIG F, REITHMAIER G, et al. Integrated superconducting detectors on semiconductors for quantum optics applications[J]. Applied Physics, 2016, B122(5): 115. doi: 10.1007/s00340-016-6376-1

[191]

KAHL O, FERRARI S, RATH P, et al. High efficiency on-chip single-photon detection for diamond nanophotonic circuits[J]. Journal of Lightwave Technology, 2016, 34(2): 249-255. doi: 10.1109/JLT.2015.2472481

[192]

WOLFF M A, VOGEL S, SPLITTHOFF L, et al. Superconducting nanowire single-photon detectors integrated with tantalum pentoxide waveguides[J]. Scientific Reports, 2020, 10(1): 17170. doi: 10.1038/s41598-020-74426-w

[193]

NAJAFI F, MOWER J, HARRIS N C, et al. On-chip detection of non-classical light by scalable integration of single-photon detectors[J]. Nature Communications, 2015, 6(1): 5873. doi: 10.1038/ncomms6873

[194]

PERNICE W H P, SCHUCK C, MINAEVA O, et al. High-speed and high-efficiency travelling wave single-photon detectors embedded in nanophotonic circuits[J]. Nature Communications, 2012, 3(1): 1325-1348. doi: 10.1038/ncomms2307

[195]

SCHUCK C, PERNICE W H P, MINAEVA O, et al. Matrix of integrated superconducting single-photon detectors with high timing resolution[J]. IEEE Transactions on Applied Superconductivity, 2013, 23(3): 2201007. doi: 10.1109/TASC.2013.2239346

[196]

LI J, KIRKWOOD R A, BAKER L J, et al. Nano-optical single-photon response mapping of waveguide integrated molybdenum silicide (MoSi) superconducting nanowires[J]. Optics Express, 2016, 24(13): 13931-13938. doi: 10.1364/OE.24.013931

[197]

BUCKLEY S, CHILES J, McCAUGHAN A N, et al. All-silicon light-emitting diodes waveguide-integrated with superconducting single-photon detectors[J]. Applied Physics Letters, 2017, 111(14): 141101. doi: 10.1063/1.4994692

[198]

GUO X, ZOU Ch L, SCHUCK C, et al. Parametric down-conversion photon-pair source on a nanophotonic chip[J]. Light: Science & Applications, 2017, 6(5): e16249.

[199]

SPRENGERS J P, GAGGERO A, SAHIN D, et al. Waveguide superconducting single-photon detectors for integrated quantum photonic circuits[J]. Applied Physics Letters, 2011, 99(18): 181110. doi: 10.1063/1.3657518

[200]

REITHMAIER G, KANIBER M, FLASSIG F, et al. On-chip generation, routing, and detection of resonance fluorescence[J]. Nano Letters, 2015, 15(8): 5208-5213. doi: 10.1021/acs.nanolett.5b01444

[201]

TANNER M G, ALVAREZ L S E, JIANG W, et al. A superconducting nanowire single photon detector on lithium niobate[J]. Nanotechnology, 2012, 23(50): 505201. doi: 10.1088/0957-4484/23/50/505201

[202]

RATH P, KAHL O, FERRARI S, et al. Superconducting single-photon detectors integrated with diamond nanophotonic circuits[J]. Light: Science & Applications, 2015, 4(10): e338.

[203]

BEYER A D, SHAW M D, MARSILI F, et al. Tungsten silicide superconducting nanowire single-photon test structures fabricated using optical lithography[J]. IEEE Transactions on Applied Superconductivity, 2015, 25(3): 2200805.

[204]

DELACOUR C, CLAUDON J, POIZAT J P, et al. Superconducting single photon detectors made by local oxidation with an atomic force microscope[J]. Applied Physics Letters, 2007, 90(19): 191116. doi: 10.1063/1.2738195

[205]

BACHAR G, BASKIN I, SHTEMPLUCK O, et al. Superconducting nanowire single photon detectors on-fiber[J]. Applied Physics Letters, 2012, 101(26): 262601. doi: 10.1063/1.4773305

[206]

YANG M, LIU L H, NING L H, et al. Fabrication of superconducting NbN meander nanowires by nano-imprint lithography[J]. Chinese Physics B, 2016, 25(1): 017401. doi: 10.1088/1674-1056/25/1/017401

[207]

MINAEV N V, TARKHOV M A, DUDOVA D S, et al. Fabrication of superconducting nanowire single-photon detectors by nonlinear femtosecond optical lithography[J]. Laser Physics Letters, 2018, 15(2): 026002. doi: 10.1088/1612-202X/aa8bd1

[208]

TOOMEY E, COLANGELO M, BERGGREN K K. Investigation of ma-N 2400 series photoresist as an electron-beam resist for superconducting nanoscale devices[J]. Journal of Vacuum Science & Technology B, 2019, 37(5): 051207.

[209]

NAJAFI F, DANE A, BELLEI F, et al. Fabrication process yielding saturated nanowire single-photon detectors with 24-ps jitter[J]. IEEE Journal of Selected Topics in Quantum Electronics, 2015, 21(2): 3800507.

[210]

MIKI S, YAMASHITA T, FUJIWARA M, et al. Multichannel SNSPD system with high detection efficiency at telecommunication wavelength[J]. Optics Letters, 2010, 35(13): 2133-2135. doi: 10.1364/OL.35.002133

[211]

ZHANG L B, WAN Ch, GU M, et al. Dual-lens beam compression for optical coupling in superconducting nanowire single-photon detectors[J]. Science Bulletin, 2015, 60(16): 1434-1438. doi: 10.1007/s11434-015-0860-6

[212]

VEREVKIN A A, ZHANG J, SLYSZ W, et al. Superconducting single-photon detectors for GHz-rate free-space quantum communications[C]//Free-Space Laser Communication and Laser Imaging Ⅱ. Seattle, USA: International Society for Optics and Photonics, 2002: 447-454.

[213]

ALLMAN M S, VERMA V B, STEVENS M, et al. A near-infrared 64-pixel superconducting nanowire single photon detector array with integrated multiplexed readout[J]. Applied Physics Letters, 2015, 106(19): 192601. doi: 10.1063/1.4921318

[214]

SHIBATA H, HIRAKI T, TSUCHIZAWA T, et al. A waveguide-integrated superconducting nanowire single-photon detector with a spot-size converter on a Si photonics platform[J]. Superconductor Science and Technology, 2019, 32(3): 034001. doi: 10.1088/1361-6668/aaf84f

[215]

MILLER A J, LITA A E, CALKINS B, et al. Compact cryogenic self-aligning fiber-to-detector coupling with losses below one percent[J]. Optics Express, 2011, 19(10): 9102-9110. doi: 10.1364/OE.19.009102

[216]

WOLFF M A, BEUTEL F, SCHVTTE J, et al. Broadband waveguide-integrated superconducting single-photon detectors with high system detection efficiency[J]. Applied Physics Letters, 2021, 118(15): 154004. doi: 10.1063/5.0046057

[217]

KERMAN A J, ROSENBERG D, MOLNAR R J, et al. Readout of superconducting nanowire single-photon detectors at high count rates[J]. Journal of Applied Physics, 2013, 113(14): 144511. doi: 10.1063/1.4799397

[218]

CAHALL C, GAUTHIER D J, KIM J. Scalable cryogenic readout circuit for a superconducting nanowire single-photon detector system[J]. Review of Scientific Instruments, 2018, 89(6): 063117. doi: 10.1063/1.5018179

[219]

ROSENBERG D, KERMAN A J, MOLNAR R J, et al. High-speed and high-efficiency superconducting nanowire single photon detector array[J]. Optics Express, 2013, 21(2): 1440. doi: 10.1364/OE.21.001440

[220]

CAHALL C, NICOLICH K L, ISLAM N T, et al. Multi-photon detection using a conventional superconducting nanowire single-photon detector[J]. Optica, 2017, 4(12): 1534. doi: 10.1364/OPTICA.4.001534

[221]

ZHU D, COLANGELO M, CHEN Ch Ch, et al. Resolving photon numbers using a superconducting nanowire with impedance-matching taper[J]. Nano Letters, 2020, 20(5): 3858-3863. doi: 10.1021/acs.nanolett.0c00985

[222]

GREIN M E, KERMAN A J, DAULER E A, et al. An optical receiver for the lunar laser communication demonstration based on photon-counting superconducting nanowires[C]//Advanced Photon Counting Techniques Ⅸ. Seattle, USA: International Society for Optics and Photonics, 2015: 949208.

[223]

ULKU A, BRUSCHINI C, MICHALET X, et al. A 512×512 SPAD image sensor with built-In gating for phasor based real-time siFLIM[J]. IEEE Journal of Selected Topics in Quantum Electronics, 2018, 25(1): 6801212.

[224]

DIVOCHIY A, MARSILI F, BITAULD D, et al. Superconducting nanowire photon-number-resolving detector at telecommunication wavelengths[J]. Nature Photonics, 2008, 2(5): 302-306. doi: 10.1038/nphoton.2008.51

[225]

DOERNER S, KUZMIN A, WUENSCH S, et al. Frequency-multiplexed bias and readout of a 16-pixel superconducting nanowire single-photon detector array[J]. Applied Physics Letters, 2017, 111(3): 032603. doi: 10.1063/1.4993779

[226]

ZHU D, ZHAO Q Y, CHOI H, et al. A scalable multi-photon coincidence detector based on superconducting nanowires[J]. Nature Nanotechnology, 2018, 13(7): 596-601. doi: 10.1038/s41565-018-0160-9

[227]

HOFHERR M, ARNDT M, IL'IN K, et al. Time-tagged multiplexing of serially biased superconducting nanowire single-photon detectors[J]. IEEE Transactions on Applied Superconductivity, 2013, 23(3): 2501205. doi: 10.1109/TASC.2013.2245935

[228]

ZHAO Q Y, McCAUGHAN A, BELLEI F, et al. Superconducting-nanowire single-photon-detector linear array[J]. Applied Physics Letters, 2013, 103(14): 142602. doi: 10.1063/1.4823542

[229]

MATTIOLI F, ZHOU Z, GAGGERO A, et al. Photon-counting and analog operation of a 24-pixel photon number resolving detector based on superconducting nanowires[J]. Optics Express, 2016, 24(8): 9067-9076. doi: 10.1364/OE.24.009067

[230]

SINCLAIR A K, SCHROEDER E, ZHU D, et al. Demonstration of microwave multiplexed readout of DC-biased superconducting nanowire detectors[J]. IEEE Transactions on Applied Superconductivity, 2019, 29(5): 2200704.

[231]

TAO X, CHEN Sh, CHEN Y J, et al. A high speed and high efficiency superconducting photon number resolving detector[J]. Superconductor Science and Technology, 2019, 32(6): 064002. doi: 10.1088/1361-6668/ab0799

[232]

GAGGERO A, MARTINI F, MATTIOLI F, et al. Amplitude-multiplexed readout of single photon detectors based on superconducting nanowires[J]. Optica, 2019, 6(6): 823-828. doi: 10.1364/OPTICA.6.000823

[233]

ALLMARAS J P, WOLLMAN E E, BEYER A D, et al. Demonstration of a thermally coupled row-column SNSPD imaging array[J]. Nano Letters, 2020, 20(3): 2163-2168. doi: 10.1021/acs.nanolett.0c00246

[234]

de CEA M, WOLLMAN E E, ATABAKI A H, et al. Photonic readout of superconducting nanowire single photon counting detectors[J]. Scientific Reports, 2020, 10(1): 9470. doi: 10.1038/s41598-020-65971-5

[235]

TERAI H, MIKI S, YAMASHITA T, et al. Demonstration of single-flux-quantum readout operation for superconducting single-photon detectors[J]. Applied Physics Letters, 2010, 97(11): 112510. doi: 10.1063/1.3484965

[236]

ORTLEPP T, HOFHERR M, FRITZSCH L, et al. Demonstration of digital readout circuit for superconducting nanowire single photon detector[J]. Optics Express, 2011, 19(19): 18593. doi: 10.1364/OE.19.018593

[237]

HOFHERR M, WETZSTEIN O, ENGERT S, et al. Orthogonal sequencing multiplexer for superconducting nanowire single-photon detectors with RSFQ electronics readout circuit[J]. Optics Express, 2012, 20(27): 28683. doi: 10.1364/OE.20.028683

[238]

MIYAJIMA S, YABUNO M, MIKI S, et al. High-time-resolved 64-channel single-flux quantum-based address encoder integrated with a multi-pixel superconducting nanowire single-photon detector[J]. Optics Express, 2018, 26(22): 29045-29054. doi: 10.1364/OE.26.029045

[239]

MIYAJIMA S, YABUNO M, MIKI S, et al. Single-flux-quantum based event-driven encoder for large-pixel superconducting nanowire single-photon detector array[J]. IEEE Transactions on Applied Superconductivity, 2019, 29(5): 2200804.

[240]

ZHENG K, ZHAO Q Y, LU H Y B, et al. A superconducting binary encoder with multigate nanowire cryotrons[J]. Nano Letters, 2020, 20(5): 3553-3559. doi: 10.1021/acs.nanolett.0c00498

[241]

ZOU K, MENG Y, XU L, et al. Superconducting nanowire photon-number-resolving detectors integrated with current reservoirs[J]. Physical Review Applied, 2020, 14(4): 044029. doi: 10.1103/PhysRevApplied.14.044029

[242]

McCAUGHAN A N. Readout architectures for superconducting nanowire single photon detectors[J]. Superconductor Science and Technology, 2018, 31(4): 040501. doi: 10.1088/1361-6668/aaa1b3

[243]

ZHAO Q Y, JIA T, GU M, et al. Counting rate enhancements in superconducting nanowire single-photon detectors with improved readout circuits[J]. Optics Letters, 2014, 39(7): 1869-1872. doi: 10.1364/OL.39.001869

[244]

BELL M, ANTIPOV A, KARASIK B, et al. Photon number-resolved detection with sequentially connected nanowires[J]. IEEE Transactions on Applied Superconductivity, 2007, 17(2): 289-292. doi: 10.1109/TASC.2007.898616

[245]

CHEN Q, ZHANG B, ZHANG L B, et al. Sixteen-pixel NbN nanowire single photon detector coupled with 300-μm fiber[J]. IEEE Photonics Journal, 2020, 12(1): 6800112.

[246]

DAULER E A, ROBINSON B S, KERMAN A J, et al. Multi-element superconducting nanowire single-photon detector[J]. IEEE Transactions on Applied Superconductivity, 2007, 17(2): 279-284. doi: 10.1109/TASC.2007.897372

[247]

VERMA V B, HORANSKY R, MARSILI F, et al. A four-pixel single-photon pulse-position array fabricated from WSi superconducting nanowire single-photon detectors[J]. Applied Physics Letters, 2014, 104(5): 051115. doi: 10.1063/1.4864075

[248]

SZYPRYT P, MEEKER S R, COIFFARD G, et al. Large-format platinum silicide microwave kinetic inductance detectors for optical to near-IR astronomy[J]. Optics Express, 2017, 25(21): 25894. doi: 10.1364/OE.25.025894

[249]

DOERNER S, KUZMIN A, WUENSCH S, et al. Operation of superconducting nanowire single-photon detectors embedded in lumped-element resonant circuits[J]. IEEE Transactions on Applied Superconductivity, 2016, 26(3): 2200205.

[250]

JAHANMIRINEJAD S, FRUCCI G, MATTIOLI F, et al. Photon-number resolving detector based on a series array of superconducting nanowires[J]. Applied Physics Letters, 2012, 101(7): 072602. doi: 10.1063/1.4746248

[251]

LIKHAREV K K. Superconductor digital electronics[J]. Physica, 2012, C482: 6-18.

[252]

McCAUGHAN A N, BERGGREN K K. A superconducting-nanowire three-terminal electrothermal device[J]. Nano Letters, 2014, 14(10): 5748-5753. doi: 10.1021/nl502629x

[253]

ZOU K, MENG Y, WANG Zh, et al. Superconducting nanowire multi-photon detectors enabled by current reservoirs[J]. Photonics Research, 2020, 8(4): 601-609. doi: 10.1364/PRJ.380764

[254]

CHEN Q, GE R, ZHANG L B, et al. Mid-infrared single photon detector with superconductor Mo_0.8Si_0.2 nanowire[J]. Science Bulletin, 2021, 66(10): 965-968. doi: 10.1016/j.scib.2021.02.024

[255]

VERMA V B, KORZH B, BUSSIèRES F, et al. High-efficiency superconducting nanowire single-photon detectors fabricated from Mo_0.8Si_0.2 thin-films[J]. Optics Express, 2015, 23(26): 33792-33801. doi: 10.1364/OE.23.033792

[256]

LI H, YANG X Y, YOU L X, et al. Improving detection efficiency of superconducting nanowire single-photon detector using multilayer antireflection coating[J]. AIP Advances, 2018, 8(11): 115022. doi: 10.1063/1.5034374

[257]

SMIRNOV K, DIVOCHIY A, VAKHTOMIN Y, et al. NbN single-photon detectors with saturated dependence of quantum efficiency[J]. Superconductor Science and Technology, IOP Publishing, 2018, 31(3): 035011. doi: 10.1088/1361-6668/aaa7aa

[258]

EROTOKRITOU K, HEATH R M, TAYLOR G G, et al. Nano-optical photoresponse mapping of superconducting nanowires with enhanced near infrared absorption[J]. Superconductor Science and Technology, 2018, 31(12): 125012. doi: 10.1088/1361-6668/aae4bb

[259]

HU P, MA Y X, LI H, et al. Superconducting single-photon detector with a system efficiency of 93% operated in a 2.4K space-application-compatible cryocooler[J]. Superconductor Science and Technology, 2021, 34(7): 07LT01. doi: 10.1088/1361-6668/abff14

[260]

GENG R X, LI H, HUANG J, et al. Self aligned superconducting nanowire single photon detector[J]. Progress in Laser and Optoelectronics, 2021, 58(10): 1011022 (in Chinese). doi: 10.3788/LOP202158.1011022

[261]

SHI CRYOGENICS GROUP. RDK-101D(L) 4K Cryocooler Series[EB/OL]. [2021-05-12]. https://www.shicryogenics.com/product/rdk-101dl-4k-cryocooler-series/.

[262]

CSIC PRIDE(NANJING) CRYOGENIC TECHNOLOGY CO LTD. Product display[EB/OL]. [2021-06-16]. https://www.724pridecryogenics.com/en/prodetail.asp?id=703.

[263]

WANG C, LICHTENWALTER B, FRIEBEL A, et al. A closed-cycle 1K refrigeration cryostat[J]. Cryogenics, 2014, 64: 5-9. doi: 10.1016/j.cryogenics.2014.07.013

[264]

ZHANG T, DANG H Zh, ZHA R, et al. Investigation of a 1.6K space cryocooler for cooling the superconducting nanowire single photon detectors[J]. IEEE Transactions on Applied Superconductivity, 2021, 31(5): 500105.

[265]

ZHANG W J, HUANG J, ZHANG Ch J, et al. A 16-pixel interleaved superconducting nanowire single-photon detector array with a maximum count rate exceeding 1.5GHz[J]. IEEE Transactions on Applied Superconductivity, 2019, 29(5): 2200204.

[266]

PITTALUGA M, MINDER M, LUCAMARINI M, et al. 600-km repeater-like quantum communications with dual-band stabilization[J]. Nature Photonics, 2021, 15(7): 530-535. doi: 10.1038/s41566-021-00811-0

[267]

SHAINLINE J M, BUCKLEY S M, MIRIN R P, et al. Superconducting optoelectronic circuits for neuromorphic computing[J]. Physical Review Applied, 2017, 7(3): 034013. doi: 10.1103/PhysRevApplied.7.034013

[268]

SCHWARTZ M, SCHMIDT E, RENGSTL U, et al. Fully on-chip single-photon Hanbury-Brown and Twiss experiment on a monolithic semiconductor-superconductor platform[J]. Nano Letters, 2018, 18(11): 6892-6897. doi: 10.1021/acs.nanolett.8b02794

[269]

GOBBY C, YUAN Z L, SHIELDS A J. Quantum key distribution over 122km of standard telecom fiber[J]. Applied Physics Letters, 2004, 84(19): 3762-3764. doi: 10.1063/1.1738173

[270]

TAKESUE H, NAM S W, ZHANG Q, et al. Quantum key distribution over a 40dB channel loss using superconducting single-photon detectors[J]. Nature Photonics, 2007, 1(6): 343-348. doi: 10.1038/nphoton.2007.75

[271]

HE Y, DING X, SU Z E, et al. Time-bin-encoded boson sampling with a single-photon device[J]. Physical Review Letters, 2017, 118(19): 190501. doi: 10.1103/PhysRevLett.118.190501

[272]

WANG H, LI W, JIANG X, et al. Toward scalable boson sampling with photon loss[J]. Physical Review Letters, 2018, 120(23): 230502. doi: 10.1103/PhysRevLett.120.230502

[273]

WANG H, QIN J, DING X, et al. Boson sampling with 20 input photons and a 60-mode interferometer in a 10¹⁴ dimensional Hilbert space[J]. Physical Review Letters, 2019, 123(25): 250503. doi: 10.1103/PhysRevLett.123.250503

[274]

LEIBFRIED D, BLATT R, MONROE C, et al. Quantum dynamics of single trapped ions[J]. Reviews of Modern Physics, 2003, 75(1): 281-324. doi: 10.1103/RevModPhys.75.281

[275]

CRAIN S, CAHALL C, VRIJSEN G, et al. High-speed low-crosstalk detection of a 171Yb⁺ qubit using superconducting nanowire single photon detectors[J]. Communications Physics, 2019, 2(1): 97-103. doi: 10.1038/s42005-019-0195-8

[276]

TODARO S L, VERMA V B, McCORMICK K C, et al. State readout of a trapped ion qubit using a trap-integrated superconducting photon detector[J]. Physical Review Letters, 2021, 126(1): 010501. doi: 10.1103/PhysRevLett.126.010501

[277]

ELSINGER L, GOURGUES R, ESMAEIL ZADEH I, et al. Integration of colloidal PbS/CdS quantum dots with plasmonic antennas and superconducting detectors on a silicon nitride photonic platform[J]. Nano Letters, 2019, 19(8): 5452-5458. doi: 10.1021/acs.nanolett.9b01948

[278]

SCHUCK C, GUO X, FAN L R, et al. Quantum interference in heterogeneous superconducting-photonic circuits on a silicon chip[J]. Nature Communications, 2016, 7(1): 10352. doi: 10.1038/ncomms10352

[279]

WARBURTON R E, McCARTHY A, WALLACE A M, et al. Subcentimeter depth resolution using a single-photon counting time-of-flight laser ranging system at 1550nm wavelength[J]. Optics Letters, 2007, 32(15): 2266-2268. doi: 10.1364/OL.32.002266

[280]

XUE L, LI Zh L, ZHANG L B, et al. Satellite laser ranging using superconducting nanowire single-photon detectors at 1064nm wavelength[J]. Optics Letters, 2016, 41(16): 3848-3851. doi: 10.1364/OL.41.003848

[281]

TANG R F, LI Zh L, LI Y Q, et al. Light curve measurements with a superconducting nanowire single-photon detector[J]. Optics Letters, 2018, 43(21): 5488-5491. doi: 10.1364/OL.43.005488

[282]

HU J H, ZHAO Q Y, ZHANG X P, et al. Photon-counting optical time-domain reflectometry using a superconducting nanowire single-photon detector[J]. Journal of Lightwave Technology, 2012, 30(16): 2583-2588. doi: 10.1109/JLT.2012.2203786

[283]

SCHUCK C, PERNICE W H P, MA X, et al. Optical time domain reflectometry with low noise waveguide-coupled superconducting nanowire single-photon detectors[J]. Applied Physics Letters, 2013, 102(19): 191104. doi: 10.1063/1.4803011

[284]

ZHAO Q Y, XIA L, WAN Ch, et al. Long-haul and high-resolution optical time domain reflectometry using superconducting nanowire single-photon detectors[J]. Scientific Reports, 2015, 5: 10441. doi: 10.1038/srep10441

[285]

YAMASHITA T, LIU D, MIKI S, et al. Fluorescence correlation spectroscopy with visible-wavelength superconducting nanowire single-photon detector[J]. Optics Express, 2014, 22(23): 28783-28789. doi: 10.1364/OE.22.028783

[286]

AL-KHUZHEYRI R, DADA A C, HUWER J, et al. Resonance fluorescence from a telecom-wavelength quantum dot[J]. Applied Physics Letters, 2016, 109(16): 163104. doi: 10.1063/1.4965845

[287]

SCHÖLL E, HANSCHKE L, SCHWEICKERT L, et al. Resonance fluorescence of GaAs quantum dots with near-unity photon indistinguishability[J]. Nano Letters, 2019, 19(4): 2404-2410. doi: 10.1021/acs.nanolett.8b05132

[288]

TOOMEY E, ZHAO Q Y, McCAUGHAN A N, et al. Frequency pulling and mixing of relaxation oscillations in superconducting nanowires[J]. Physical Review Applied, 2018, 9(6): 064021. doi: 10.1103/PhysRevApplied.9.064021

[289]

McCAUGHAN A N, VERMA V B, BUCKLEY S M, et al. A superconducting thermal switch with ultrahigh impedance for interfacing superconductors to semiconductors[J]. Nature Electronics, 2019, 2(10): 451-456. doi: 10.1038/s41928-019-0300-8

[290]

ROSTICHER M, LADAN F R, MANEVAL J P, et al. A high efficiency superconducting nanowire single electron detector[J]. Applied Physics Letters, 2010, 97(18): 183106. doi: 10.1063/1.3506692

[291]

SCLAFANI M, MARKSTEINER M, KEIR F M, et al. Sensitivity of a superconducting nanowire detector for single ions at low energy[J]. Nanotechnology, 2012, 23(6): 065501. doi: 10.1088/0957-4484/23/6/065501

[292]

MARSILI F, BELLEI F, NAJAFI F, et al. Efficient single photon detection from 500nm to 5μm wavelength[J]. Nano Letters, 2012, 12(9): 4799-4804. doi: 10.1021/nl302245n

[293]

CAO H S, TER BRAKE H J M. Progress in and outlook for cryogenic microcooling[J]. Physical Review Applied, 2020, 14(4): 044044. doi: 10.1103/PhysRevApplied.14.044044