[1] |
BIMBAUM M,STOCKER T L.Effect of electron-hole recombination processes on semiconductor reflectivity modulation[J].J A P,1966,17(4):461-465. |
[2] |
FAUCHET P M,SIEGMAN A E.Surface ripples on silicon and gallium arsenide under picosecond laser illumination[J].A P L,1982,40(2):824-826. |
[3] |
SIPE J E,YOUNG J F,PRESTON J S,et al.Laser-induced periodic surface structure.Ⅰ.Theory[J].Phys Rev,1983,B27(2):1141-1154. |
[4] |
TOMITA T,FUKUMORI Y,KINOSHITA K,et al.Observation of laser-induced surface waves on flat silicon surface[J].A P L,2009,92(1):013104/1-013104/3. |
[5] |
LOWNDES D H,FOWLKES J D,PEDRAZA A J.Early stages of pulsed-laser growth of silicon microcolumns and microcones in air and SF6[J].Applied Surface Science,2000,154/155(1/4):647-658. |
[6] |
YOUNKIN R,CAREY J E,MAZUR E,et al.Infrared absorption by conical silicon microstructures made in a variety of background gases using femtosecond-laser pulses[J].J A P,2003,93(5):2626-2629. |
[7] |
CROUCH C H,CAREY J E,SHEN M,et al.Infrared absorption by sulfur-doped silicon formed by femtosecond laser irradiation[J].Appl Phys,2004,A79(7):1635-1641. |
[8] |
KARABUTOV A V,SHAFEEV G A,BADI N,et al.3-D periodic structures grown on silicon by radiation of a pulsed Nd:YAG laser and their field emission properties[J].Applied Surface Science,2006,252(13):4453-4456. |
[9] |
CROUCH C H,CAREY J E,WARRENDER J M,et al.Comparison of structure and properties of femtosecond and nanosecond laser-structured silicon[J].A P L,2004,84(11):1850-1852. |
[10] |
HALBWAX M,SARNET T,DELAPORTE P H,et al.Micro and nano-structuration of silicon by femtosecond laser:application to silicon photovoltaic cells fabrication[J].Thin Solid Films,2008,516(20):6791-6795. |
[11] |
CRACIUN V,CRACIUN D.Evidence for volume boiling during laser ablation of single crystalline targets[J].Applied Surface Science,1999,138/139(1):218-223. |
[12] |
CHUANG T J.Multiple photo excited SF6 interaction with silicon suefaces[J].Journal of Chemical Physics,1981,74(2):1453-1460. |
[13] |
SEEL M,BAGUS P S.Ab initio cluster study of the interaction of fluorine and chlorine with the Si (111) surface[J].Phys Rev,1983,B28(4):2023-2038. |
[14] |
LI X L,LI J,TAO X Y.The thermal analysis of ultra short laser pulse ablation on semiconductor surface[J].Laser Technology,2007,31(6):624-629(in Chinese). |