[1] LU J,CHU J,HUANG W H,et al.Preparation of thick Pb(Zr,Ti)O3 (PZT) film by electrostatic spray deposition (ESD) for application in micro-system technology[J]. Applied Physics,2002,41 (6):4317-4320.
[2] KONDO I,YONEYAMA T.Formation of high adhesive and pure Pt lasers on TiO2[J].Journal of Vacuum Science Technology,1992,A10(6):3456-3459.
[3] LEE W,KIM Y,KIM H.Pt-base electrodes and effects on phase formations and electrical properties of high dielectric thin films[J].Thin Solid Flims,1995,269 (1/2):75-79.
[4] KUSHIDA K A.Pt/TiN electrodes for stacked memory with polysilicon plug utilizing PZT films[J].Integrated Ferroelectrics,1996,13(1/3):113-119.
[5] SALGUEIRRO J R,ROMAN J F,MORENO V.System for laser writing to lithograph masks for integrated optics[J].Optical Engineering,1998,37(4):1115-1123.
[6] HARURNA M,TAKAHASHI M,WAKAHAYASHI K,et al.Laser beam lithographed micor-Fresnel lenses[J].Applied Optic,1990,29(34):5120-5126.
[7] BABER S C Application of high resolution laser writers to computer generated holograms and binary diffractive optics[J].Proceedings of SPIE,1989,1052:66-76.
[8] KOTECKI D E. High-K dielectric materials for DRAM capacitors[J].Semiconductor International,1996,19(12):109-110.
[9] ZHANG F,ZENG X Y,LI X Y,et al.Laser etching and cutting printed circuit board by 355nm and 1064nm diode pumped solid-state lasers[J].Chinese Journal of Lasers,2008,35 (10):1637-1643 (in Chinese).
[10] LIANG F C,HUJ,XU Z J.Realization of electric control of laser direct writing mesh on concave spherical substrate[J].Optics and Precision Engineering,2006,14(5):792-796 (in Chinese).
[11] WEI G J,SHAO J,ZHOU X H,et al.Laser direct writing system of fabricating binary optical elements[J].Journal of Optoelectronics.Laser,2006,17(10):1213-1215(in Chinese).
[12] LUO P,WU Y F,YUE S,et al.Polygonal approximating algorithm of digital curves for bitmap laser marking[J].Laser Technology,2011,35(3):372-375 (in Chinese).
[13] LIU J W,ZENG X Y.Status and prospect of laser direct writing[J].Laser Journal,2001,22(6):15-18(in Chinese).
[14] SUN J F,TANG J H,GUO X G.The analysis of laser trimming resistance technical on the resistance value precision[J].Applied Laser,2004,24(3):139-141 (in Chinese).