[1] LIU J M, CAO F G. Application and development trend of laser combined machining technology[J]. Electromachining & Mould, 2006, 4(5):5-9 (in Chinese).
[2] CHEN Y L, XU B C, YUAN G F, et al. Study on the removed quantity of difficult to machine materials in laser chemical combined[J]. China Mechanical Engineering, 2009, 20(11): 1356-1360 (in Chinese).
[3] ZHANG H, XU J W, WANG J M. Experimental study of neutral salt solution assisted laser machining[J]. Chinese Journal of Lasers, 2008, 35(11):1836-1840 (in Chinese). doi: 10.3788/JCL
[4] SU H X. Water guided laser processing technology[J]. Optoelectronic Technology & Information, 1998, 11(3):35-38 (in Chinese).
[5] WANG X Y, XU W X, XU W J, et al. Simulation and experiment of laser bending of silicon sheet[J]. Optics and Precision Engineering, 2008, 16(4): 605-610(in Chinese).
[6] ZHAN C J, LI C F, PAN Y C, et al. Analysis of fluid flow in micro-waterjet guided laser precision drilling process[J]. Chinese Quarterly of Mechanics, 2011, 32(2): 159-165 (in Chinese).
[7] ZHANG C T, YUAN G F, CHEN X H, et al. Experimental study about effect of water-jet to laser etching of crystal silicon[J]. Applied Laser, 2014, 31(6): 557-561 (in Chinese).
[8] FU Y H, CAO J, DONG F, et al. CFD simulation of the laser stable water beam in micro water-jet guided laser[J]. Fluid Machinery, 2013, 42(8): 21-25 (in Chinese).
[9] EDDIE Y K.The stability of 30μm-diameter water jet for jet-guided laser machining[J].International Journal of Advanced Manufacturing Technology, 2015, 7(8):939-946.
[10] ZHOU J J, XU G Q, ZHANG H J. FLUENT software engineering techniques and case analysis[M]. Beijing: China Water & Power Press, 2010:39-365(in Chinese).
[11] DING X S, JIAO N. Fluent 14.5 fluid simulation calculation from the Introduction to the master[M]. Beijing: Tsinghua University Press, 2014:23-186(in Chinese).
[12] LI J, ZHANG Q, ZHOU Y Zh.Analysis of influence of nozzle convergence on water-jet capacity[J]. Information Technology, 2015, 44(5): 102-104 (in Chinese).
[13] YANG Y S, ZHANG J P, NIE S L. Energy loss of nozzles in water jet system[J]. Journal of Mechanical Engineering, 2013, 49(2):139-144(in Chinese). doi: 10.3901/JME.2013.02.139
[14] PEI E R, CHAI J Ch. Research on the flow characteristic of spray nozzle and design[J]. Journal of Drainage and Irrigation Machinery Engineering, 2004, 22(5): 29-31(in Chinese).
[15] ZHUANG L X, YIN X Y, MA H Y. Fluid mechanics[M]. Hefei: University of Science and Technology of China Prass, 2009:145-336 (in Chinese).
[16] WISAN C, VIBOON T, CHAIYA D. Preliminary study of ultrasonic assisted underwater laser micromachining of silicon[J]. Applied Mechanics and Material, 2016, 835(2):139-143.
[17] WEE L M, KHOONG L E, TAN C W, et al. Solvent-assisted laser drilling of silicon carbide[J]. International Journal of Applied Ceramic Technology, 2011, 8(6): 1263-1276. doi: 10.1111/ijac.2011.8.issue-6