飞秒脉冲激光诱导可控自组织纳米周期结构研究

李智华; 李海霞; 张静宇; 陈珊

飞秒脉冲激光诱导可控自组织纳米周期结构研究

1.
华中科技大学
2.
华中科技大学物理学院

通讯作者: 李智华, lizhihua@mail.hust.edu.cn ;

基金项目:
国家自然科学基金

Investigation of controlable self-organized nanostructures induced by femtosecond laser

Corresponding author: , lizhihua@mail.hust.edu.cn ;

摘要: 为了研究激光诱导可控自组织纳米周期结构的可能性，采用半波片连续改变入射线偏振激光的电矢量方向，首次在金属Ag块靶上制备了取向可控的自组织纳米光栅结构，并基于能量累积效应和数值拟合的诱导自组织纳米光栅结构取向与激光线偏振角度间的依赖关系，对在靶材表面实现任意二维自组织纳米周期结构的可能性进行了讨论，并且结合激光动态交替扫描法，发现这种自组织纳米周期结构单元在靶材表面上大面积、高规整度地制备有望实现。研究结果为激光诱导任意二维纳米周期结构打开了新思路，也为这种纳米周期结构的可控制备提供重要的理论线索。
- 周期结构单元
Abstract: In order to discuss the possibility of manufacturing controllable nanostrucures by femtosecond laser, orientation-controllable nanogratings are firstly induced on bulk Ag target by femtosecond pulsed laser whose linear plolarization angle is adjusted continuously by two inserted half-wave plates. Then, based on energy accumulation effects and the dependence of the orientation of self-organized nanogratings on laser polarization angle obtained from our experiments, it is discussed how to controlably induce two-dimensional periodic nanostructrues on target surfaces by femtosecond laser. In addition, conbining the laser scannning approach with muli-beam alternative ablations method, large-area and high-uniformity nanostructures with tunable nanounits are expected to be manufactured. Our inverstigaitons are expected to open a new approach of inducing two-dimensional periodic nanostructures with tunable nanounits and to offer some important clues for controllably manufacturing periodic nanostructures on target surfaces by ultrashort pulsed laser.

[1]

1． Olga Varlamove Jurgen Reif, Sergey Varlamov, Michael Bestehorn, The laser polarizaiton as control parameter in the formation of laser induced periodic surface structures: comparison of numerical and experimental results, Applied Surface Science 257(2011) 5465～5469[2]2． Pingxin Xiong, Tianqing Jia, Xin Jia et.al, Ultraviolet luminescence enhancement of ZnO two dimensional periodic nanostructures fabricated by the interference of three femtoseconc laser beams, New Journal of Physics 13 (2011) 023044(14pp)[3]3． Barada K.Nayak, Mool C. Gupta, Self-organized micro/nano structures in metal surfaces by ultrafast laser irradiation, Optics and Lasers in Engineering 48 (2010) 940～949[4]4． Shuji Sakabe, Masaki Hashida, Shigeki Tokita et.al, Mechanism for self-formation of periodic grating structures on a metal surface by a femtosecond laser pulse[J], Phycical Review B, 2009, Vol.79: 033409-1～033409-4[5]5． A.Y.Vorobyev and Chunlei Guo, Femtosecond laser induced periodic surface structure formation on tungsten[J], Journal of Applied Physics, 2008, Vol104:063523～063525[6]6． Taek Yong Hwang, A.Y.Vorobyev, Chunlei Guo, Ultrafast dynamics of femtosecond laser induced nanostructures formation on metals[J], Applied Physics Letters, 2009, Vol.95:123111-1～123111-3[7]A.Y.Vorobyev, AN.Toplov, O.V.Gurin et.al, Enhanced absorption of metals over ultrabroad electromagnetic spectrum[J].Applied Physics Letters,2009,Vol.95:121106-1 [8]8． Shinoda, Masataka, Mazur Eric, Femtosecond laser-induced formation of nanometer-width grooves on synthetic single-crystal diamond surfaces[J], Journal of Applied Physics,2009, Vol.105: 053102～053106[9]X.D.Guo, RX.Li, Y.Hang et.al, Femtosecond laser-induced periodic surface structures on ZnO[J].Materials Letters,2009,Vol.62:1769-1771 [10]X.D.Guo, RX.Li, Y.Hang, et.al, Coherent linking of periodic nano ripples on a ZnO crystal surface induced by femtosecond laser pulses[J].Appl.Phys.A,2009,Vol.94:423-426 [11]11． Huang Min, Zhao Fuli, Cheng Ya et.al, Large area uniform nanostructures fabricted by direct femtosecond laser ablation[J], Optics Express, 2008, Vol.16:19354～19365[12]12． Huang Min, Zhao Fuli, Jia Tianqing et.al, A uniform 290nm periodic square structure on ZnO fabricated by two-beam femtosecond laser ablation[J], Nanotechnology, 2007, Vol.18: 505301-1～505301-6[13]Zhihua Li, Punian Li, Jinqing Fan et.al, Energy accumulation effect and parameter optimization for fabrication of high-uniform and large-area period surface structures induced by femtosecond pulsed laser[J].[J].Optics and Lasers in Engineering,2009,Vol.48:64- [14]Li Zhihua, Fan Jingqing, Li Punain et.al, Effect of Laser Energy Accumulation on Surface Periodic Structure Induced by Femtosecond Laser[J], Chinese Journal of Lasers, 2010， Vol37(1):68-73.[李智华，范敬钦，李普年等能量累积效应对飞秒激光诱导表面周期结构的影响[J].中国激光,2010,Vol.37(1):68-73 [15]Li Punian, Li Zhihua, Fan Jingqin, Effects of Incident Angle on Metal Periodic Structures Induced by Femtosecond Laser Pulses[J], Acta optica sinica, 2009, Vol.29(7): 1902-1904[李普年，李智华，范敬钦，入射角对飞秒激光诱导表面周期结构的影响[J].光学学报,2009,Vol.29(7):1902-1904 [16]Wu Tengfei, Zhou Changhe, Zhu Linwei, Periodic microstructures on chromium film induced by femtosecond laser[J],Chinese Journal of Lasers, 2010, Vol.7（3）：722-725[J].[武腾飞，周常河，朱林伟，飞秒激光诱导铬膜产生周期性微结构，中国激光,2010,Vol.7(3):722-725 [17]M.Birnbaum, Semiconductor surface damage produced by ruby lasers[J], J[J].Appl.Phys,1965,Vol.36:3688-3689 [18]VARLAMOVA O, REIF J, VARLAMOV S, et al.the laser polarizaiton as control parameter in the formation of laser induced periodic surface structures: comparison of numerical and experimental results[J].Applied Surface Science,2011,257(12):5465-469 [19]XIONG P X, JIA T Q, JIA X, et al.Ultraviolet luminescence enhancement of ZnO two dimensional periodic nanostructures fabricated by the interference of three femtosecond laser beams[J].New Journal of Physics,2011,13(2):023044- [20]BARADA K N, MOOL C G.Self-organized micro/nano structures in metal surfaces by ultrafast laser irradiation[J].Optics and Lasers in Engineering,2010,48(10):940-49 [21]SAKABE S, HASHIDA M, TOKITA S, et al.Mechanism for self-formation of periodic grating structures on a metal surface by a femtosecond laser pulse[J].Phycical Review,2009,B79(3):033409- [22]VOROBYEV A Y, GUO Ch L.Femtosecond laser induced periodic surface structure formation on tungsten[J].Journal of Applied Physics,2008,104(6):063523-63525 [23]HWANG T Y, VOROBYEV A Y, GUO CH L.Ultrafast dynamics of femtosecond laser induced nanostructures formation on metals[J].Applied Physics Letters,2009,95(12):123111- [24]VOROBYEW A Y, TOPLOY A N, GURIN O V, et al.Enhanced absorption of metals over ultrabroad electromagnetic spectrum[J].Applied Physics Letters,2009,95(12):121106- [25]SHINODA M, MAZUR E.Femtosecond laser-induced formation of nanometer-width grooves on synthetic single-crystal diamond surfaces[J].Journal of Applied Physics,2009,105(5):053102-053106 [26]GUO X D, LI R X, HANG Y, et al.Femtosecond laser-induced periodic surface structures on ZnO[J].Materials Letters,2009,62(12/13):1769-1771 [27]GUO X D, LI R X, HANG Y, et al.Coherent linking of periodic nano ripples on a ZnO crystal surface induced by femtosecond laser pulses[J].Applied Physics,2009,A94(2):423-426 [28]HUANG M, ZHAO F L, CHENG Y, et al.Large area uniform nanostructures fabricated by direct femtosecond laser ablation[J].Optics Express,2008,16(23):19354-19365 [29]HUANG M, ZHAO F L, JIA T Q, et al.A uniform 290nm periodic square structure on ZnO fabricated by two-beam femtosecond laser ablation[J].Nanotechnology,2007,18(50):505301- [30]LI Zh H, LI P N, FAN J Q, et al.Energy accumulation effect and parameter optimization for fabrication of high-uniform and large-area period surface structures induced by femtosecond pulsed laser[J].Optics and Lasers in Engineering,2009,48(1):64-68 [31]LI Zh H, FAN J Q, LI P N, et al.Effect of laser energy accumulation on surface periodic structure induced by femtosecond laser[J].Chinese Journal of Lasers,2010,37(1):68-73 [32]LI P N, LI Zh H, F J Q.Effects of incident angle on metal periodic structures induced by femtosecond laser pulses[J].Acta Optica Sinica,2009,29(7):1902-1904 [33]WU T F, ZHOU CH H, ZHU L W.Periodic microstructures on chromium film induced by femtosecond laser[J].Chinese Journal of Lasers,2010,7(3):722-725 [34]BIRNBAUM M.Semiconductor surface damage produced by ruby lasers[J].Journal of Applied Physics,1965,36(11):3688-3689

[1]	尚海 , 党学明 . 1维微纳米周期结构的散射测量建模. 激光技术, 2016, 40(2): 250-253. doi: 10.7510/jgjs.issn.1001-3806.2016.02.021
[2]	程阳 . 复周期结构光子晶体的禁带特性. 激光技术, 2011, 35(4): 570-572. doi: 10.3969/j.issn.1001-3806.2011.04.032
[3]	倪志波 , 宋连科 , 刘建苹 , 郑萌萌 . 反射型单元结构对称分束偏光棱镜的设计. 激光技术, 2008, 32(2): 151-153,156.
[4]	罗娜 , 欧攀 , 张春熹 , 周金男 . 用于梳状结构光学测速系统的周期优化方法. 激光技术, 2015, 39(1): 71-75. doi: 10.7510/jgjs.issn.1001-3806.2015.01.014
[5]	高胜淼 , 闫珂柱 , 韩培高 , 许春玉 , 王荣新 . 飞秒激光诱导硅材料表面周期结构的研究. 激光技术, 2015, 39(3): 395-398. doi: 10.7510/jgjs.issn.1001-3806.2015.03.025
[6]	吴建伟 , 罗风光 . 低功率光脉冲在均匀周期结构中的慢光传输. 激光技术, 2007, 31(6): 593-595,599.
[7]	叶霞 , 周明 , 王泽 , 雷卫宁 , 陈菊芳 , 蔡兰 . 纳秒激光诱导热解碳表面周期结构及参量优化. 激光技术, 2013, 37(4): 537-540. doi: 10.7510/jgjs.issn.1001-3806.2013.04.027
[8]	江德全 . 组件化的电光跟踪单元. 激光技术, 1980, 4(1): 28-31,38.
[9]	尤俊成 , 周虹 , 官春林 , 樊新龙 , 牟进博 . 913单元变形镜性能测试与分析. 激光技术, 2017, 41(6): 867-871. doi: 10.7510/jgjs.issn.1001-3806.2017.06.020
[10]	杨怀江 , 沈柯 , 翁兆恒 , 周立伟 . 光学混沌之周期窗口控制技术. 激光技术, 1996, 20(5): 281-284.
[11]	吕百达 . 高功率固体激光和相关单元技术研究的新进展. 激光技术, 1998, 22(4): 193-198.
[12]	吴福全 , 李国华 . 单元大分束角双反射偏光分束镜研制. 激光技术, 1991, 15(5): 317-320.
[13]	杨华峰 , 姜宗福 . 对Zernike模式法重构19单元哈特曼测量波前的研究. 激光技术, 2005, 29(5): 484-487.
[14]	刘旭安 , 程和平 , 焦铮 . 双孔单元四边形晶格光子晶体光纤特性的研究. 激光技术, 2019, 43(1): 48-52. doi: 10.7510/jgjs.issn.1001-3806.2019.01.010
[15]	马丽丽 , 宋连科 , 吴福全 , 郝殿中 , 王涛 . 单元式偏光分束棱镜分束角和光强分束比. 激光技术, 2008, 32(3): 299-301.
[16]	刘宏展 , 刘立人 . 星间激光通信发射终端耦合单元的研究. 激光技术, 2007, 31(4): 416-418.
[17]	陈根余 , 陈建明 , 梅丽芳 , 王祖建 . 汽车白车身激光焊接生产线单元设计及分析. 激光技术, 2011, 35(1): 7-10. doi: 10.3969/j.issn.1001-3806.2011.01.003
[18]	朱长虹 , 李正佳 , 陈殊殊 , 丘军林 , 刘百宁 . 被动调Q激光脉冲周期的研究. 激光技术, 2000, 24(2): 85-89.
[19]	王丽 , 王晶 , 胡曙阳 , 周劲峰 , 何士雅 . 长周期光纤光栅用于EDFA的增益平坦展宽. 激光技术, 2004, 28(4): 366-369.
[20]	张廷蓉 , 吕百达 . 失调周期光学系统的等效变换. 激光技术, 2003, 27(1): 47-49.

点击查看大图

计量

文章访问数: 3237
HTML全文浏览量: 569
PDF下载量: 496
被引次数: 0

姓名
邮箱
手机号码
标题
留言内容
验证码

留言板

飞秒脉冲激光诱导可控自组织纳米周期结构研究

通讯作者: 李智华, lizhihua@mail.hust.edu.cn ;

Investigation of controlable self-organized nanostructures induced by femtosecond laser

Corresponding author: , lizhihua@mail.hust.edu.cn ;

计量

飞秒脉冲激光诱导可控自组织纳米周期结构研究

通讯作者: 李智华, lizhihua@mail.hust.edu.cn;

English Abstract

Investigation of controlable self-organized nanostructures induced by femtosecond laser

Corresponding author: , lizhihua@mail.hust.edu.cn

全文HTML

目录

留言板

飞秒脉冲激光诱导可控自组织纳米周期结构研究

通讯作者: 李智华, lizhihua@mail.hust.edu.cn ;

Investigation of controlable self-organized nanostructures induced by femtosecond laser

Corresponding author: , lizhihua@mail.hust.edu.cn ;

计量

出版历程

飞秒脉冲激光诱导可控自组织纳米周期结构研究

通讯作者: 李智华, lizhihua@mail.hust.edu.cn;

English Abstract

Investigation of controlable self-organized nanostructures induced by femtosecond laser

Corresponding author: , lizhihua@mail.hust.edu.cn

全文HTML

目录