脉宽1ms和10ns的激光损伤光学薄膜元件的比较分析

戴罡; 陆建; 王斌; 刘剑; 倪晓武

doi:10.3969/j.issn.1001-3806.2011.04.010

脉宽1ms和10ns的激光损伤光学薄膜元件的比较分析

1.
南京理工大学理学院, 南京 210094

作者简介: 戴罡(1984- ),男,博士研究生,从事激光与光学薄膜相互作用的研究..

通讯作者: 陆建, 1j6805@163.com ;

中图分类号: 0484.4⁺1

Analysis and comparison of coating damage induced by laser at lms and lOns pulse-widths

1.
College of Science, Nanjing University of Science and Technology, Nanjing 210094, China

Corresponding author: LU Jian, 1j6805@163.com ;

CLC number: 0484.4⁺1

摘要: 为了研究脉宽为毫秒量级的激光对光学薄膜的损伤,根据国际标准ISO-11254和国家标准GB/T-16601建立了光学薄膜损伤阈值测试装置。测量了脉宽1ms和10ns、波长1064nm激光作用下TiO2/SiO2增透膜的损伤阈值,观测了损伤形貌,测量了损伤厚度及损伤半径,分析了毫秒量级激光损伤光学薄膜的损伤机理并与纳秒激光引起的损伤进行比较。脉宽1ms的激光致使光学薄膜损伤的能量密度阈值比脉宽10ns的激光高一个数量级,功率密度阈值低4个数量级,损伤半径大180μm,损伤厚度大200μm。结果表明,脉宽为毫秒量级的激光对光学薄膜的损伤更为剧烈,不但损伤了光学薄膜的膜层,而且对光学薄膜的基底也造成了毁灭性的损伤。该结果可供脉宽为毫秒量级的激光与光学薄膜相互作用的研究参考。
- 薄膜 /
- 长脉冲激光 /
- 损伤阈值 /
- 损伤机理 /
- 基底损伤
Abstract: In order to investigate the damage induced by ms laser,the experiment installation was established according to ISO-11254 and GB/T-16601.The 1064nm laser-induced damage thresholds of Ti2/Si2 coatings at lms and 10ns pulse-widths were studied,and the damage photos,damage depth,damage radius and damage mechanisms were also investigated.The damage of the coatings induced by ms laser was compared with that induced by ns laser.The damage threshold of energy density induced by ms laser is one order of magnitude higher than that of 10ns laser,and the damage threshold of power density induced by ms laser is one ten-thousandth of that of 10ns laser.The damage radius induced by ms laser is 180μm longer than that induced by ns laser,and the damage depth is 200μm deeper.It could be concluded that 1ms laser induced damage of optical coatings is more severe,it not only damage the coating but also destroy the substrate of the coating.The results provide important references for the researches of damage induced laser with pulse duration at millisecond scale.

[1]	ALVISI M,GIULIO M D,MARRONE S,et al.HfO2 films with high laser damge threshold[J].Thin Solid Films,2000,358(1/2):250-258.
[2]	XU Y,ZHANG B,FAN W H,et al.Sol-gel broadband anti-reflective single-layer silica films with high laser damage threshold[J].Thin Solid Films,2003,440(1/2):180-183.
[3]	ZHOU W J,YUAN Y H,GUI Y Z.Simple time measurement of TiO2/SiO2 film damaged by laser[J].Laser Technology,2007,31(4):381-383(in Chinese).
[4]	YOSHIDA K,UMEMURA N.Wavelength dependence of laser induced damage in fused silica and fused quartz[J].Proceedings of SPIE,1998,3244:164.
[5]	YAO J K,FAN Z X,JIN Y,et al.Investigation of damage threshold to TiOsub>2 coatings at different laser wavelength and pulse duration[J].Thin Solid Films,2008,516(6):1237-1241.
[6]	YAO J K,SHAO J D,HE H B,et al.Effects of annealing on laserinduced damage threshold of TiO2/SiO2 high rcflectors[J].Applied Surface Science,2007,253(22):8911-8914.
[7]	SIRCAR A,DWIVEDI R K,THAREJA R K.Laser induced breakdowm of Ar,N2 and O2 gases using 1.064,0.532,0.355 and 0.266 μm radiation[J].Applied Physics,1996,B63(6):623-627.
[8]	SPRANGLE P,PENANO J R,HAFIZ B.Propagation ofintense short laser pulses in the atmosphere[J].Physical Review,2002,E66(4):046418.
[9]	CHAMPEAUX S,BERGE L.Poationuation regimea of femtosecond laaer pulses self-channeling in air[J].Physical Review,2005,E71(4):046604.
[10]	BOLEY C,CUITER K,FOCHS S,et al.Interaction ofa high-poeer laser beam with metal sheets[J].Journal of Applied Physics,2010,107(4):043106.
[11]	USOV S,MINAEV I,High-powerimpulse YAG laser system for cutting,vrelding and perforsting of super hard materials[J].Journal of Materials Processing Technology,2004,149(1/3):541-545.
[12]	DIENER K,GERNANDT L,MOEGUN J,et al.Study of the influence of the Nd:YAC Jasex irradiation at 1.3ym on the thermal mechanical optical parameters of gennanium[J].Optics and Lasers in Engineering,2005,43(11):1179-1192.
[13]	ZHU Y N.Discussion of the measurement methods for laser induced damage threshold of optical coating[J].Laser Technology,2006,30(5):532-535(in Chinese).
[14]	GALLAIS L,CAPOULADE J,WAGNER F,et al.Analysis of material modifications induced during laaer damage in SiO2 thin films[J].Optics Communications,2007,272(1):221-226.
[15]	RISTAU D,JUPE M,STARKE K.Laser dmnage thresholds of optical coatings[J].Thin Solid Filmo,2009,518(5):1607-1613.

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脉宽1ms和10ns的激光损伤光学薄膜元件的比较分析

作者简介: 戴罡(1984- ),男,博士研究生,从事激光与光学薄膜相互作用的研究..

通讯作者: 陆建, 1j6805@163.com ;

Analysis and comparison of coating damage induced by laser at lms and lOns pulse-widths

Corresponding author: LU Jian, 1j6805@163.com ;

计量

脉宽1ms和10ns的激光损伤光学薄膜元件的比较分析

通讯作者: 陆建, 1j6805@163.com;

作者简介: 戴罡(1984- ),男,博士研究生,从事激光与光学薄膜相互作用的研究.

English Abstract

Analysis and comparison of coating damage induced by laser at lms and lOns pulse-widths

Corresponding author: LU Jian, 1j6805@163.com

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脉宽1ms和10ns的激光损伤光学薄膜元件的比较分析

作者简介: 戴罡(1984- ),男,博士研究生,从事激光与光学薄膜相互作用的研究..

通讯作者: 陆建, 1j6805@163.com ;

Analysis and comparison of coating damage induced by laser at lms and lOns pulse-widths

Corresponding author: LU Jian, 1j6805@163.com ;

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脉宽1ms和10ns的激光损伤光学薄膜元件的比较分析

通讯作者: 陆建, 1j6805@163.com;

作者简介: 戴罡(1984- ),男,博士研究生,从事激光与光学薄膜相互作用的研究.

English Abstract

Analysis and comparison of coating damage induced by laser at lms and lOns pulse-widths

Corresponding author: LU Jian, 1j6805@163.com

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