紧凑型光谱薄膜测厚仪的研制

刘佳敏; 陶泽; 张传维; 刘世元

doi:10.7510/jgjs.issn.1001-3806.2016.04.003

紧凑型光谱薄膜测厚仪的研制

1.
华中科技大学数字制造装备与技术国家重点实验室, 武汉 430074

作者简介: 刘佳敏(1994-),男,硕士研究生,现主要从事光谱椭偏仪的研究.

通讯作者: 张传维, chuanweizhang@hust.edu.cn ;

基金项目:
湖北省科技支撑计划资助项目(2014BEC052);湖北省自然科学基金资助项目(2015CFB278);国家重大科学仪器设备开发专项资助项目(2011YQ160002)
中图分类号: TN249

Development of a compact spectral thickness measurement instrument for thin film

1.
State Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, China

Corresponding author: ZHANG Chuanwei, chuanweizhang@hust.edu.cn ;

CLC number: TN249

摘要: 为了开发一种用于测量各向同性均匀薄膜介质厚度的紧凑型薄膜测厚仪,采用了共光路垂直入射设计,利用薄膜干涉原理,通过非线性优化算法对反射光谱进行了拟合,反演计算出了薄膜样品的厚度。采用该仪器测量部分SiO2/Si薄膜样件,测量结果与商业椭偏仪测量结果之间的相对偏差小于0.5%,而单次测量时间仅为70ms。结果表明,该薄膜测厚仪具有对测量距离不敏感、光路简洁、结构紧凑及重复性精度良好等优点,对实现在线实时测量功能具有积极意义。
- 测量与计量 /
- 光谱薄膜测厚仪 /
- 紧凑 /
- 逆问题 /
- 干涉 /
- 不确定度
Abstract: In order to develop a compact instrument to measure the thickness of isotropic uniform thin films, applying a common normal incident path and thin-film interference principle, the film thickness was calculated inversely by fitting the measured reflectance spectrum with nonlinear optimization algorithm. The relative error between the thickness of a SiO2/Si thin film measured by the proposed instrument and that measured by the commercial ellipsometer was less than 0.5%, and the time for a single measurement was about 70ms. Experimental results show that the proposed instrument has advantages of insensitivity to measuring distance, concise light path, compact structure and excellent repeatability. The study has great significance for online measurement of thin film thickness.
- measurement and metrology /
- spectral thickness measurement instrument for thin film /
- compact /
- inverse problem /
- interference /
- uncertainty

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紧凑型光谱薄膜测厚仪的研制

作者简介: 刘佳敏(1994-),男,硕士研究生,现主要从事光谱椭偏仪的研究.

通讯作者: 张传维, chuanweizhang@hust.edu.cn ;

Development of a compact spectral thickness measurement instrument for thin film

Corresponding author: ZHANG Chuanwei, chuanweizhang@hust.edu.cn ;

计量

紧凑型光谱薄膜测厚仪的研制

通讯作者: 张传维, chuanweizhang@hust.edu.cn;

作者简介: 刘佳敏(1994-),男,硕士研究生,现主要从事光谱椭偏仪的研究

English Abstract

Development of a compact spectral thickness measurement instrument for thin film

Corresponding author: ZHANG Chuanwei, chuanweizhang@hust.edu.cn

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紧凑型光谱薄膜测厚仪的研制

作者简介: 刘佳敏(1994-),男,硕士研究生,现主要从事光谱椭偏仪的研究.

通讯作者: 张传维, chuanweizhang@hust.edu.cn ;

Development of a compact spectral thickness measurement instrument for thin film

Corresponding author: ZHANG Chuanwei, chuanweizhang@hust.edu.cn ;

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出版历程

紧凑型光谱薄膜测厚仪的研制

通讯作者: 张传维, chuanweizhang@hust.edu.cn;

作者简介: 刘佳敏(1994-),男,硕士研究生,现主要从事光谱椭偏仪的研究

English Abstract

Development of a compact spectral thickness measurement instrument for thin film

Corresponding author: ZHANG Chuanwei, chuanweizhang@hust.edu.cn

全文HTML

目录