基于光子混频连续太赫兹波的厚度检测

刘子烨; 刘建军; 洪治

doi:10.7510/jgjs.issn.1001-3806.2016.04.009

基于光子混频连续太赫兹波的厚度检测

1.
中国计量大学太赫兹技术与应用研究所, 杭州 310018

作者简介: 刘子烨(1989-),女,硕士研究生,主要从事太赫兹波成像技术的研究.

通讯作者: 洪治, hongzhi@cjlu.edu.cn

基金项目:
国家自然科学基金资助项目(60576042;61377108)
中图分类号: TN247

Thickness measurement by means of continuous wave terahertz based on photomixing

1.
Centre for THz Research, China Jiliang University, Hangzhou 310018, China

Corresponding author: HONG Zhi, hongzhi@cjlu.edu.cn

CLC number: TN247

摘要: 为了将光子混频的连续太赫兹波透射成像系统应用于样品厚度检测中,采用该系统获得的相位信息对样品进行了2维厚度测量。利用两个外腔半导体结构的激光器搭建了基于光子混频的连续太赫兹波透射成像系统,并利用X-Y 2维电动平移台放置样品进行点点扫描成像。该系统可同时获得样品的幅度信息和相位信息,在太赫兹波辐射频率0.47THz时,系统信噪比可达68dB。计算得出的厚度值与实际样品的厚度值最大相差0.02mm;另外还分析了平行平面样品干涉效应和样品不同透射强度对厚度测量的影响。结果表明,样品折射率越高,平行平面干涉效应对厚度测量影响越大;样品透射系数越大,测量精度也越高。当样品太赫兹波透射系数大于0.5时,厚度测量精度优于2.0%。
- 测量与计量 /
- 厚度测量 /
- 相位信息 /
- 光子混频 /
- 连续太赫兹波成像
Abstract: In order to measure thickness of a specimen with a continuous wave terahertz imaging system based on photomixing, its 2-D thickness was measured by means of the phase information obtained from the imaging system. A continuous wave terahertz imaging system based on photomixing was established by using two external cavity laser diodes. The specimen was placed on the X-Y motorized precision translation stage and point-to-point scanning images were generated. Both the amplitude and phase information can be obtained simultaneously through the system. The signal-to-noise ratio of the system was 68dB at the frequency of 0.47THz. The deviation between the calculated result and the actual measurement was less than 0.02mm. The influences of the interference of plane specimen and transmission intensity on thickness measurement accuracy were analyzed. The results show that, the higher refractive index of the plane specimen is, the greater interference influence on thickness measurement becomes. The accuracy increases with the increase of terahertz transmission. The accuracy of thickness is better than 2.0% when the transmission coefficient is higher than 0.5.
- measurement and metrology /
- thickness measurement /
- phase information /
- photomixing /
- continuous wave terahertz imaging

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基于光子混频连续太赫兹波的厚度检测

作者简介: 刘子烨(1989-),女,硕士研究生,主要从事太赫兹波成像技术的研究.

通讯作者: 洪治, hongzhi@cjlu.edu.cn

Thickness measurement by means of continuous wave terahertz based on photomixing

Corresponding author: HONG Zhi, hongzhi@cjlu.edu.cn

计量

基于光子混频连续太赫兹波的厚度检测

通讯作者: 洪治, hongzhi@cjlu.edu.cn

作者简介: 刘子烨(1989-),女,硕士研究生,主要从事太赫兹波成像技术的研究

English Abstract

Thickness measurement by means of continuous wave terahertz based on photomixing

Corresponding author: HONG Zhi, hongzhi@cjlu.edu.cn

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留言板

基于光子混频连续太赫兹波的厚度检测

作者简介: 刘子烨(1989-),女,硕士研究生,主要从事太赫兹波成像技术的研究.

通讯作者: 洪治, hongzhi@cjlu.edu.cn

Thickness measurement by means of continuous wave terahertz based on photomixing

Corresponding author: HONG Zhi, hongzhi@cjlu.edu.cn

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出版历程

基于光子混频连续太赫兹波的厚度检测

通讯作者: 洪治, hongzhi@cjlu.edu.cn

作者简介: 刘子烨(1989-),女,硕士研究生,主要从事太赫兹波成像技术的研究

English Abstract

Thickness measurement by means of continuous wave terahertz based on photomixing

Corresponding author: HONG Zhi, hongzhi@cjlu.edu.cn

全文HTML

目录