Effect of YAG laser parameters on etching crater morphology

ZHAN Jian; YANG Ming-jiang

doi:10.3969/j.issn.1001-3806.2011.02.026

In order to increase the etching depth with one laser pulse and promote the production efficiency,the effect of laser parameters on the etching depth was studied by means of double acousto-optic modulation technique after comparing the laser pulse etching crater morphology under different pulse energy density and two different lasers.The results showed:when the pulse energy density was 20.21 J/cm2,the etching crater depth reached the maximum,and when continuing to increase the energy density,the crater depth would be reduced;compared with single-cavity laser,the crater depth with two-cavities laser increased from 5μm to 10μm,and the crater diameter reduced from 161 μm to 134μm.

Effect of YAG laser parameters on etching crater morphology

Corresponding author: YANG Ming-jiang, ymjl@imech.ac.cn

1. Institute of Mechanics, Chinese Academy of Sciences, Beijing 100190, China

Received Date: 2010-04-22

Accepted Date: 2010-05-17

Available Online: 2011-03-25

Abstract: In order to increase the etching depth with one laser pulse and promote the production efficiency,the effect of laser parameters on the etching depth was studied by means of double acousto-optic modulation technique after comparing the laser pulse etching crater morphology under different pulse energy density and two different lasers.The results showed:when the pulse energy density was 20.21 J/cm2,the etching crater depth reached the maximum,and when continuing to increase the energy density,the crater depth would be reduced;compared with single-cavity laser,the crater depth with two-cavities laser increased from 5μm to 10μm,and the crater diameter reduced from 161 μm to 134μm.

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Reference (11)

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Effect of YAG laser parameters on etching crater morphology

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References

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