3-D simulation of nano-grating by Cr atom beam deposition

ZHANG Bao-wu; MA Yan; ZHAO Min; ZHANG Wen-tao

doi:10.3969/j.issn.1001-3806.2011.03.020

Volume 35 Issue 3

May 2013

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3-D simulation of nano-grating by Cr atom beam deposition

1.
College of Metrology & Measurement Engineering, China Jiliang University, Hangzhou 310018, China;
2.
Department of Physics, Tongji University, Shanghai 200092, China;
3.
Department of Electronic Engineering, Guilin University of Electronic Technology, Guilin 541004, China

Received Date: 2010-06-01
Accepted Date: 2010-08-26

Abstract

In order to study the deposition of 52Cr atomic interacted by a focused near-resonant Gaussian standing-laser at 425.55nm wavelength, 3-D simulation was carried out based on both particle-optics and wave-mechanical approaches. The results show that the deposited nano-grating has uniform period along laser vector direction, and similar structure along the direction perpendicular to laser vector. In addition, the deposited nano-grating may be split with the increase of laser power. Due to the wave property, the simulated nano-grating presents obvious interference side peak. All the simulation results provide abundant theory for experiments.
- laser technique,
- laser-focusing,
- atomic beam,
- atomic wave-packet,
- nano-grating

References

[1]	CHU S.The manipulation of neutral particles[J].Reviews of Modern Physics,1998,70(3)： 685-706.
[2]	COHEN-TANNOUDJI C N.Manipulating atoms with photons[J].Reviews of Modern Physics,1998,70(3)：707-720.
[3]	PHILLIPS W D.Laser cooling and trapping of neutral atoms[J].Reviews of Modern Physics,1998,70(3)：721-741.
[4]	RAAB E L,PRENTISS M,CABLE A,et al.Trapping of neutral sodium atoms with radiation pressure[J].Physical Review Letters,1987,59(23)：2631-2634.
[5]	CREN P,ROOS C F,ACLAN A,et al.Loading of a cold atomic beam into a magnetic guide[J].European Physical Journal,2002,D20(1)：107-116.
[6]	OVCHINNIKOV Y B.Compact magneto-optical sources of slow atoms[J].Optics Communications,2005,249(4)：473-481.
[7]	DIMOVA E,MORIZOT O,STERN G,et al.Continuous transfer and laser guiding between two cold atom traps[J].European Physical Journal,2007,D42(2)： 299-308.
[8]	GUSTAVSON T L,LANDRAGIN A,KASEVICH M A.Rotation sensing with a dual atom-interferometer sagnac gyroscope[J].Classical and Quantum Gravity,2000,17(12)：2385-2390.
[9]	FIXLER J B,FOSTER G T,MCGUIRK J M,et al.Atom interferometer measurement of the newtonian constant of gravity[J].Science,2007,315(5)：74-77.
[10]	CANUEL B,LEDUC F,HOLLEVILLE D,et al.Six-axis inertial sensor using cold-atom interferometry[J].Physical Review Letters,2006,97(1):010402-010405.
[11]	RIOU J F,GUERIN W,LECOQ Y,et al.Beam quality of a nonideal atom laser[J].Physical Review Letters,2006,96(7):070404-070407.
[12]	DIDDAMS S A,BERGQUIST J C,JEFFERTS S R,et al.Standards of time and frequency at the outset of the 21st century [ J ].Science,2004,306(19):1318-1324.
[13]	TIMP G,BEHRINGER R E,TENNANT D M,et al.Using light as a lens for submicron,neutral-atom lithography [J].Physical Review Letters，1992,69(11):1636-1639.
[14]	McClELLAND J J,SCHOLTEN RE,PALM C,et al.Laser-focused atomic deposition[J].Science,1993,262(5135):877-880.
[15]	LU X D,LI T B,MA Y,et al.Investigation of atom-optical properties of laser focused Cr atomic deposition[J].Acta Physica Sinica，2009，58(12):8205-8211 (in Chinese).
[16]	LI T B.Nanometrology and transfer standard[J].Shanghai Measurement and Testing,2005,32(1):8-13(in Chinese).
[17]	McCLELLAND J J,ANDERSON W R,BRADLEY C C,et al.Accuracy of nanoscale pith standards fabribcated by laser-focused atomic deposition [J].Journal of Research of the National Institute of Standards and Technology,2003,108(2):99-113.
[18]	PETRA S J H,FEENSTRA L,HOGERRVOST W,et al.Nanolithography with metastable helium atoms in a high-power standing-wave light field[J].Applied Physics,2004,B78(2):133-136.
[19]	ZHANG B W,MA Y,LI T B,et al.Effect of laser power on one-dimensional deposition of chromium atomic beam[J].Acta Optica Sinica,2009,29(2):421-424(in Chinese).
[20]	ZHAO M,WANG Zh Sh,MA Y,et al.Quantum simulation for peak broadening in atom lithography[J].Chinese Optics Letters,2007,5(10):602-604.
[21]	ALTI K,PATRA A S,KHARE A.Two-dimensional periodic potential via multiple-beam interferometry for atom lithography[J].Journal of Microlithography,Microfabrication and Microsystems,2006,5(2):023005.
[22]	CARSTEN B,JURGEN B,ANGELA K.Computing light masks in neutral atom lithography[J].Journal of Computational Physics,2006,220(1):422-440.
[23]	te SLIGTE E,van der STAM K M R,SMEETS B,et al.Barrier-limited surface diffusion in atom lithography[J].Journal of Applied Physics,2004,95(4):1749-1755.
[24]	ZHANG B W,MA Y,LI T B.Collimation of chromium atomic beam by means of 1-D Doppler laser[J].Laser Technology,2009,33(4):347-350(in Chinese).
[25]	DALIBARD J,COHEN-TANNOUDJI C N.Dressed-atom approach to atomic motion in laser light:the dipole force revisited[J].Journal of the Optical Society of America,1985,B2(11):1707-1720.
[26]	McCLELLAND J J.Nanofabrication via atom optics[C] //Handbook of Nanostructured Materials and Nanotechnology.San Diego,USA:Academic Press,2000:335-385.
[27]	KIDAN T,ADLER J,RON A.Numerical simulations of an atomic beam focused by an optical potential[J].Computers in Physics,1998,12(5):471-477.
[28]	McCLELLAND J J.Atom-optical properties of a standing-wave light field[J].Journal of the Optical Society of America,1995,B12(10):1761-1767.

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通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142

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3-D simulation of nano-grating by Cr atom beam deposition

1. College of Metrology & Measurement Engineering, China Jiliang University, Hangzhou 310018, China;

2. Department of Physics, Tongji University, Shanghai 200092, China;

3. Department of Electronic Engineering, Guilin University of Electronic Technology, Guilin 541004, China

Received Date: 2010-06-01

Accepted Date: 2010-08-26

Available Online: 2011-05-25

Abstract: In order to study the deposition of 52Cr atomic interacted by a focused near-resonant Gaussian standing-laser at 425.55nm wavelength, 3-D simulation was carried out based on both particle-optics and wave-mechanical approaches. The results show that the deposited nano-grating has uniform period along laser vector direction, and similar structure along the direction perpendicular to laser vector. In addition, the deposited nano-grating may be split with the increase of laser power. Due to the wave property, the simulated nano-grating presents obvious interference side peak. All the simulation results provide abundant theory for experiments.

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Reference (28)

[1]	CHU S.The manipulation of neutral particles[J].Reviews of Modern Physics,1998,70(3)： 685-706.
[2]	COHEN-TANNOUDJI C N.Manipulating atoms with photons[J].Reviews of Modern Physics,1998,70(3)：707-720.
[3]	PHILLIPS W D.Laser cooling and trapping of neutral atoms[J].Reviews of Modern Physics,1998,70(3)：721-741.
[4]	RAAB E L,PRENTISS M,CABLE A,et al.Trapping of neutral sodium atoms with radiation pressure[J].Physical Review Letters,1987,59(23)：2631-2634.
[5]	CREN P,ROOS C F,ACLAN A,et al.Loading of a cold atomic beam into a magnetic guide[J].European Physical Journal,2002,D20(1)：107-116.
[6]	OVCHINNIKOV Y B.Compact magneto-optical sources of slow atoms[J].Optics Communications,2005,249(4)：473-481.
[7]	DIMOVA E,MORIZOT O,STERN G,et al.Continuous transfer and laser guiding between two cold atom traps[J].European Physical Journal,2007,D42(2)： 299-308.
[8]	GUSTAVSON T L,LANDRAGIN A,KASEVICH M A.Rotation sensing with a dual atom-interferometer sagnac gyroscope[J].Classical and Quantum Gravity,2000,17(12)：2385-2390.
[9]	FIXLER J B,FOSTER G T,MCGUIRK J M,et al.Atom interferometer measurement of the newtonian constant of gravity[J].Science,2007,315(5)：74-77.
[10]	CANUEL B,LEDUC F,HOLLEVILLE D,et al.Six-axis inertial sensor using cold-atom interferometry[J].Physical Review Letters,2006,97(1):010402-010405.
[11]	RIOU J F,GUERIN W,LECOQ Y,et al.Beam quality of a nonideal atom laser[J].Physical Review Letters,2006,96(7):070404-070407.
[12]	DIDDAMS S A,BERGQUIST J C,JEFFERTS S R,et al.Standards of time and frequency at the outset of the 21st century [ J ].Science,2004,306(19):1318-1324.
[13]	TIMP G,BEHRINGER R E,TENNANT D M,et al.Using light as a lens for submicron,neutral-atom lithography [J].Physical Review Letters，1992,69(11):1636-1639.
[14]	McClELLAND J J,SCHOLTEN RE,PALM C,et al.Laser-focused atomic deposition[J].Science,1993,262(5135):877-880.
[15]	LU X D,LI T B,MA Y,et al.Investigation of atom-optical properties of laser focused Cr atomic deposition[J].Acta Physica Sinica，2009，58(12):8205-8211 (in Chinese).
[16]	LI T B.Nanometrology and transfer standard[J].Shanghai Measurement and Testing,2005,32(1):8-13(in Chinese).
[17]	McCLELLAND J J,ANDERSON W R,BRADLEY C C,et al.Accuracy of nanoscale pith standards fabribcated by laser-focused atomic deposition [J].Journal of Research of the National Institute of Standards and Technology,2003,108(2):99-113.
[18]	PETRA S J H,FEENSTRA L,HOGERRVOST W,et al.Nanolithography with metastable helium atoms in a high-power standing-wave light field[J].Applied Physics,2004,B78(2):133-136.
[19]	ZHANG B W,MA Y,LI T B,et al.Effect of laser power on one-dimensional deposition of chromium atomic beam[J].Acta Optica Sinica,2009,29(2):421-424(in Chinese).
[20]	ZHAO M,WANG Zh Sh,MA Y,et al.Quantum simulation for peak broadening in atom lithography[J].Chinese Optics Letters,2007,5(10):602-604.
[21]	ALTI K,PATRA A S,KHARE A.Two-dimensional periodic potential via multiple-beam interferometry for atom lithography[J].Journal of Microlithography,Microfabrication and Microsystems,2006,5(2):023005.
[22]	CARSTEN B,JURGEN B,ANGELA K.Computing light masks in neutral atom lithography[J].Journal of Computational Physics,2006,220(1):422-440.
[23]	te SLIGTE E,van der STAM K M R,SMEETS B,et al.Barrier-limited surface diffusion in atom lithography[J].Journal of Applied Physics,2004,95(4):1749-1755.
[24]	ZHANG B W,MA Y,LI T B.Collimation of chromium atomic beam by means of 1-D Doppler laser[J].Laser Technology,2009,33(4):347-350(in Chinese).
[25]	DALIBARD J,COHEN-TANNOUDJI C N.Dressed-atom approach to atomic motion in laser light:the dipole force revisited[J].Journal of the Optical Society of America,1985,B2(11):1707-1720.
[26]	McCLELLAND J J.Nanofabrication via atom optics[C] //Handbook of Nanostructured Materials and Nanotechnology.San Diego,USA:Academic Press,2000:335-385.
[27]	KIDAN T,ADLER J,RON A.Numerical simulations of an atomic beam focused by an optical potential[J].Computers in Physics,1998,12(5):471-477.
[28]	McCLELLAND J J.Atom-optical properties of a standing-wave light field[J].Journal of the Optical Society of America,1995,B12(10):1761-1767.

3-D simulation of nano-grating by Cr atom beam deposition

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通讯作者: 陈斌, bchen63@163.com

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3-D simulation of nano-grating by Cr atom beam deposition

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