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Volume 36 Issue 2
Jan.  2012
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基于FPGA的外差干涉信号处理方法

  • Received Date: 2011-05-25
    Accepted Date: 2011-07-03
  • 外差信号处理系统是外差干涉测量系统精度测量的重要组成部分。为了实现外差干涉的相位移测量,采用一种整数计数和小数计数相结合的外差信号相位测量方法,利用VERILOG语言编写整数计数以及小数计数模块程序,并进行了仿真验证,理论分析测量分辨率为(11π/375)rad。结果表明,该方案硬件实现电路简单、可移植性强,只需一个基于现场可编程门阵列的最小系统即可实现。
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  • [1]

    CHEN B Y,LI D Ch.Challenges and opportunities of nanomeasurement technology[J].Chinese Journal of Scientific Instrument,2005,26(5):547-550(in Chinese).
    [2]

    IBRAHIM K M,ABDUL-KARIM M A H.A novel digital phase meter[J].IEEE Transaction on Instrumentation and Measurement,1987,36(3):711-716.
    [3]

    WAGDY M F,LUCAS M S P.A phase-measurement offset compensation technique suitable for automation[J].IEEE Transaction on Instrumentation and Measurement,1987,36(3):721-724.
    [4]

    NICOLI J A G.Multiperiodical phasemeter:US,4157500[P].1979-07-05.
    [5]

    YANG T B,LUO X,LI D Ch.Dynamic data collection method of heterodyne interferometer based on FPGA[J].Optical Technique,2003,29(6):114-116(in Chinese).
    [6]

    ZHANG Ch M,ZHAO Y,LI D Ch.Application of filling pulse method to phase detection of uncommon-frequecy signal[J].Opto-Electionic Enginerring,2000,27(3):40-43(in Chinese).
    [7]

    ZHAO Y,LI D Ch.Heterodyne interferometer signal processing method based on phase and phase integer measurement[J].Acta Metrological Sinica,1995,16(1):31-36(in Chinese).
    [8]

    DAI G L.The study on dual-frequency laser interferometer for nanometrology[D].Beijing:Tsinghua University,1998:1-168(in Chinese).
    [9]

    OLDHAM N M,KRAMAR J A,HETRICK P S,et al.Electronic limitations in phase meters for heterodyne interferometry[J].Precision Engineering,1993,15(3):173-179.
    [10]

    WU Ch M.Heterodyne interferometric system with subnanometer accuracy for measurement of straightness[J].Applied Optics,2004,43(19):3812-3816.
    [11]

    QIU X Q,LE Y F,WANG J.Interpolation of heterodyne interferometric signals based on FPGA[J].Laser Technology,2011,35(2):199-206(in Chinese).
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通讯作者: 陈斌, bchen63@163.com
  • 1. 

    沈阳化工大学材料科学与工程学院 沈阳 110142

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基于FPGA的外差干涉信号处理方法

  • 1. School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China

Abstract: 外差信号处理系统是外差干涉测量系统精度测量的重要组成部分。为了实现外差干涉的相位移测量,采用一种整数计数和小数计数相结合的外差信号相位测量方法,利用VERILOG语言编写整数计数以及小数计数模块程序,并进行了仿真验证,理论分析测量分辨率为(11π/375)rad。结果表明,该方案硬件实现电路简单、可移植性强,只需一个基于现场可编程门阵列的最小系统即可实现。

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