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Volume 13 Issue 6
Sep.  2013
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Modulating grids for evaporation and analysis of them

  • Received Date: 1988-12-14
  • The forms and functions of the modulating grids for the evaporating particle beam during the evaporation are discussed.The relationship among the evaporating rate,the modulating coefficient and the thickness of the depositing film is analysesed at the same time.An applied example of stabilizing the evaporating rate with the modulating grid is given.Some points to be noted in practice is also pointed out.
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  • [1] 张伟等,红外中性周期渐变减光板的研制,《激光与光学》,待发表.

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通讯作者: 陈斌, bchen63@163.com
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    沈阳化工大学材料科学与工程学院 沈阳 110142

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Modulating grids for evaporation and analysis of them

  • 1. Harbin Institute of Technology

Abstract: The forms and functions of the modulating grids for the evaporating particle beam during the evaporation are discussed.The relationship among the evaporating rate,the modulating coefficient and the thickness of the depositing film is analysesed at the same time.An applied example of stabilizing the evaporating rate with the modulating grid is given.Some points to be noted in practice is also pointed out.

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