Study on the fabrication technology of SnO2 microlens and its array by using excimer laser-CVD technique

Wang Qingya; Ma Li; Zhao Fanghai; Zheng Wei; Zhang Yushu; Gao Dingsan

Here we fabricate a microlens with 45μm radius and its array with liquid SnCl4 and oxygen as the sources by using excimer laser CVD technique. Acording to its growing mechanism and growing law,we also show the characteristics and the prospects of this technology.

1. Dept. of Electronic & Engineering, Jilin University, Jilin Univ.Division of integrated Optoelectronics Union Lab

Received Date: 1995-03-10

Accepted Date: 1995-12-26

Available Online: 1996-05-25

Abstract: Here we fabricate a microlens with 45μm radius and its array with liquid SnCl4 and oxygen as the sources by using excimer laser CVD technique. Acording to its growing mechanism and growing law,we also show the characteristics and the prospects of this technology.

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Reference (25)

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Study on the fabrication technology of SnO2 microlens and its array by using excimer laser-CVD technique

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References

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