Amplitude vector analytics of binary optical element fabrication errors
- Received Date: 1996-02-12
- Available Online: 1996-09-25
Abstract: This paper analyses the fabrication errors of binary optical elements exerting an influence on diffraction efficiency through amplitude vector analytics.In terms of the four level element,the analytical formula about the diffraction efficiency,aim error and the error of etching depth is deduced and discussed.This method has the universal sense for 2n-level binary optical elements.