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Volume 22 Issue 4
Sep.  2013
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Article Navigation >  LASER TECHNOLOGY  > 1998 >  22(4): 207-211

Citation:
shu

A new method for noncontact rapid measurement of surface roughness

  • 1.

    Shandong Institute of Technology, Zibo, 255012;

  • 2.

    Zibo Teacher's College, Zibo, 255013

  • Received Date: 1996-10-28
    Accepted Date: 1997-04-19
  • An optical detection technique for rapid measurement of surface roughness by using a laser beam is proposed.When a laser beam illuminate on the surface of a aluminum specimen,the space distribution of the reflected light intensity will be the function of the roughness of the surface of the specimen.And the intensity distribution can be measured with a plasma coupled device (PCD) and approximately expressed with Gaussian function.The broadness of the intensity distribution curve can be evaluated with standard deviation called Gaussian curve parameter (GCP).We find a experimental equation Ra=0.088GCP+0.032 to show the relationship between center line average roughness Ra and GCP in range of 0.1～0.5μm.
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  • 1. 

    沈阳化工大学材料科学与工程学院 沈阳 110142

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A new method for noncontact rapid measurement of surface roughness

  • 1. Shandong Institute of Technology, Zibo, 255012;
  • 2. Zibo Teacher's College, Zibo, 255013
  • Received Date: 1996-10-28
  • Accepted Date: 1997-04-19
  • Available Online: 1998-07-25

Abstract: An optical detection technique for rapid measurement of surface roughness by using a laser beam is proposed.When a laser beam illuminate on the surface of a aluminum specimen,the space distribution of the reflected light intensity will be the function of the roughness of the surface of the specimen.And the intensity distribution can be measured with a plasma coupled device (PCD) and approximately expressed with Gaussian function.The broadness of the intensity distribution curve can be evaluated with standard deviation called Gaussian curve parameter (GCP).We find a experimental equation Ra=0.088GCP+0.032 to show the relationship between center line average roughness Ra and GCP in range of 0.1～0.5μm.

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