Micropatterns on polymers etched by excimer lasers
- Received Date: 2000-11-27
- Accepted Date: 2001-03-28
- Available Online: 2002-03-25
Abstract: In the paper,the experiment with UV excimer laser etching PI for micropatterns is described in detail.With this method,micropatterns with micron scale line width and sub micron depth have been successfully fabricated on PI.