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Volume 28 Issue 4
Sep.  2013
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Citation:
shu

Effect of noise ray on properties of position sensitive detector

  • 1.

    Department of Electronic Science and Technology, Harbin Institute of Technology, Harbin 150001, China

  • Received Date: 2003-08-18
    Accepted Date: 2003-09-15
  • The construction and theory of position sensitive detection (PSD),the output equation at the presence of steady stray light are mainly introduced in this paper.In the same time,the methods of eliminating the steady stray light and the results of experiments are given.The experiment results show that the resolution of linear displacement can reach 2μm.
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  • [1] 王晓东,赵杰,蔡鹤皋.使用PSD设计非接触测距传感器及其性能分析 [J].哈尔滨工业大学学报,1996(28):100～104.
    [2] 张新,王爵树.光电位置传感器测量位置原理及应用分析 [J].集成电路通讯,1993(4):43～45.
    [3] 张伯珩,边川平,金世俊 et al.光电位置传感器在转角精密定位中的应用 [J].光子学报,2001,30(4):505～507.
    [4] 曾超,李锋,徐向东.光电位置传感器PSD特性及其应用 [J].光学仪器,2002(4):30～33.
    [5] 许忠保,王保龙.位置敏感器件PSD抗干扰方法研究 [J].仪表技术与传感器,2000(8):39～40.
    [6] 金森哉吏.三次元位置计测とための误差解析 [J].精密工学会志,1998(64):1143～1147.
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  • 1. 

    沈阳化工大学材料科学与工程学院 沈阳 110142

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Effect of noise ray on properties of position sensitive detector

  • 1. Department of Electronic Science and Technology, Harbin Institute of Technology, Harbin 150001, China
  • Received Date: 2003-08-18
  • Accepted Date: 2003-09-15
  • Available Online: 2004-07-25

Abstract: The construction and theory of position sensitive detection (PSD),the output equation at the presence of steady stray light are mainly introduced in this paper.In the same time,the methods of eliminating the steady stray light and the results of experiments are given.The experiment results show that the resolution of linear displacement can reach 2μm.

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