Design of MEMS coplanar waveguide cavity bandstop filter

ZHAO Ji-de; LI Ying-liang; MA Chuan-long

The MEMS CPW is analyzed,and a novel MEMS designed based on the CPW.The electromagnetism and thermal stress are studied.The parameters of the microscale filter are analyzed,and significant data is obtained for actual MEMS filter.If the design parameters are changed,the different performance of MEMS resonators and filters are obtained.The partial theory and practicality experience of material choice and components design study of wireless communications MEMS devices are provided.

1. Yantai Normal University, Yantai 264025, China;

2. Huaxin Posts & Communications Consulting Designing Institute Co. Ltd, Hangzhou 310014, China;

3. Chongqing Institute of Communications, Chongqing 400014, China

Received Date: 2004-08-03

Accepted Date: 2004-10-11

Available Online: 2005-11-25

Abstract: The MEMS CPW is analyzed,and a novel MEMS designed based on the CPW.The electromagnetism and thermal stress are studied.The parameters of the microscale filter are analyzed,and significant data is obtained for actual MEMS filter.If the design parameters are changed,the different performance of MEMS resonators and filters are obtained.The partial theory and practicality experience of material choice and components design study of wireless communications MEMS devices are provided.

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Reference (8)

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Design of MEMS coplanar waveguide cavity bandstop filter

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References

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