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Volume 30 Issue 3
Sep.  2013
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Research of technical parameters of Nd∶YAG laser scribing silicon film solar cell

  • Corresponding author: LI Zheng-jia, zhjli@mail.hust.edu.cn
  • Received Date: 2005-03-07
    Accepted Date: 2005-04-08
  • An optical-thermal model in cylindrical coordinate of pulsed laser scribing multi-layer thin film solar cell module is established.Monte Carlo method is employed to obtain the light fluencies rate of multi-layer material.Finite element method(FEM) is used to solve the heat equation in cylindrical coordinate.And the connection of the laser energy density,repeatition frequency,the shape of pulse and facula,scribing rate and scribing quality is obtained.
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  • [1]

    MATULIONIS I,NAKADE S,COMPAAN A D et al.Wavelength and pulse duration effects in laser scribing of thin films[A].Photovoltaic Specialists Conference,1997,Conference Record of the Twenty-Sixth IEEE[C].Anaheim,CA:IEEE Press,1997.491~494.
    [2]

    COMPAAN A D,MATULIONIS I,MILLER M et al.Optimization of laser scribing for thin-film photovolaics[A].Photovoltaic Specialists Conference,1996,Conference Record of the Twenty-Fifth IEEE[C].Washington DC:IEEE Press,1996.769~772.
    [3]

    QI J,WANG K L,LIANG M Ch et al.Study on laser scribing of silicon wafer with a Q-switched Nd∶ YAG laser[J].Journal of Materials Engineering,1999,44(3):45~48(in Chinese).
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    BIANCO N,MANCA O.Two-dimensional transient analysis of absorbing thin films in laser treatments[J].American Society or Mechanical Engineers Journal of Heat Transfer,2000,122(2):113~117.
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    ANGELUCCI N,BIANCO N,MANCA O et al.Thermal transient analysis of thin film multilayers heated by pulsed laser[J].International Journal of Heat and Mass Transfer,1997,40(11):4487~4491.
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    GRIGOROPOULOS C P,PARK H K,XU X et al.Modeling of pulsed laser irradiation of thin silicon layers[J].International Journal of Heat and Mass Transfer,1993,36(4):919~924.
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    KIYAMA S,HIRONO Y,HOSOKAWA H et al.Temperature distribution analysis in multi-layer thin film structure by laser beam irradiation[J].Japan Society of Precision Engineering,1990,56(6):1500~1506.
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    ONG C K,TAN H S,SIN E H et al.Calculation of melting threshold of crystalline and amorphous materials due to pulsed-laser irradiation[J].Material Science & Engineering,1986,79(3):79~85.
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    沈阳化工大学材料科学与工程学院 沈阳 110142

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Research of technical parameters of Nd∶YAG laser scribing silicon film solar cell

    Corresponding author: LI Zheng-jia, zhjli@mail.hust.edu.cn
  • 1. National Laborafory of Laser Technology, HUST, Wuhan 430074, China;
  • 2. Department of Opto-Electronics Engineering, HUST, Wuhan 430074, China

Abstract: An optical-thermal model in cylindrical coordinate of pulsed laser scribing multi-layer thin film solar cell module is established.Monte Carlo method is employed to obtain the light fluencies rate of multi-layer material.Finite element method(FEM) is used to solve the heat equation in cylindrical coordinate.And the connection of the laser energy density,repeatition frequency,the shape of pulse and facula,scribing rate and scribing quality is obtained.

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