Abstract: In order to obtain high pulsed energy output from an excimer laser, the Chang's electrode theory was used to design a compact electrode for producing large area uniform electric field. Through numerical simulation of ANSYS software, the electric field distribution on the electrode surface was obtained and compared with the theoretical results of the compact Chang electrode. The effect of ultraviolet pre ionization structure on electrode discharging was analyzed. The potential and electric field distribution were simulated. The results show that the presence of preionization plate directly affects the potential and electric field distribution between electrodes. The simulation results of electric field can be used to explain the formation of discharging between the top of preionization plate and anode. The study provides deeper theoretical support for the design of large area glow discharge electrodes.