Abstract: In order to investigate the process of 266nm ultraviolet solid-state laser cutting of carbon fiber reinforced plastics (CFRP). The experiment on 266nm ultraviolet solid-state laser cutting CFRP were carried out by single factor experiment, orthogonal experiment, and multiple linear regression analysis, respectively. The effects of laser energy and scanning speed on the width of slit and the width of heat-affected zone were obtained. The results show that with the increasing of laser energy, both the width of the slit and the width of the heat-affected zone increase accordingly. With the increasing of scanning speed, both the width of slit and the width of heat-affected zone decrease. In the experiment, the minimum width of heat-affected zone is 82μm, and the minimum width of slit is 50μm. The influence of laser scanning speed on the width of the slit is more significant, whereas the influence of laser energy on the width of the heat-affected zone is more significant. The empirical formula can quantitatively describe the relationship among the width of the slit, the width of the heat-affected zone, and the laser energy and scanning speed. It has a reference significance for the further research and industrial application of 266nm ultraviolet solid-state laser cutting of CFRP.