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圆光栅角位移测量误差补偿技术的展望

Prospects of error compensation technology for circular grating angular displacement measurement

  • 摘要: 随着智能制造和精密加工技术的迭代升级,圆光栅角位移测量技术凭借其角秒级的反馈精度和高频响应特性,在高精度伺服控制和超精密机械加工领域中被广泛应用。系统归纳了圆光栅角位移测量过程中多源误差对测量精度的差异化影响,依据其频谱特性将测量误差划分为长周期误差、短周期误差和随机变化误差,介绍了3类误差的物理成因;梳理了国内外创新型圆光栅误差补偿技术,总结了3类误差补偿技术的研究现状;对测量误差补偿技术的特点进行了分析,并展望了圆光栅角位移测量误差补偿技术的发展前景。

     

    Abstract:
    The circular grating angular displacement measurement technology, with advantages such as arc-second-level precision and full-cycle large measurement range, has become a core sensing technology in the field of industrial automation and is widely applied in high-end CNC machine tools, industrial robots, and other fields. This study analyzes the principles, error categories, compensation technologies, current limitations, and future prospects of this technology.
    The measurement principle involves converting angular displacement into optical signals through the interference effect between absolute grating code disc and index grating, followed by photoelectric conversion and signal processing to achieve high-precision analysis. Measurement errors can be decomposed into long-period harmonic errors, random variation errors, and fixed offset errors. The first two are the main factors affecting precision, caused by issues such as code disc eccentricity and tilt, and environmental interference, respectively.
    In terms of error compensation technologies, long-period error compensation is relatively mature. For eccentricity errors, methods such as the three-center model and eccentricity self-detection are available. For tilt errors, technologies such as the rotation angle prediction model and three-reading-head average compensation are adopted. Additionally, metal cylindrical circular gratings can promote device miniaturization, but some methods have problems such as time-consuming calibration and complex algorithms. Short-period error compensation focuses on nonuniform grating ruling and interpolation subdivision errors, such as angular velocity quantification ruling errors and parallel coordinate rotation calculation methods. Although these approaches can improve precision, they face limitations such as poor real-time performance and constrained dynamic response. Random variation error compensation addresses interferences like contamination, temperature, and vibration using methods such as pattern normalization and nonlinear fitting models. However, these compensation models have poor universality and are prone to signal loss.
    Current technologies have multiple shortcomings. Long-period compensation ignores inherent defects of code discs. Short-period compensation struggles to quantify harmonic components in real time. Random error compensation fails to consider the coupling of environmental factors, and increasing code disc engraved line density brings new problems.
    Future technological development can be promoted from four aspects: introducing intelligent control systems for long-period error compensation, adopting enhanced circuits and algorithms for short-period error compensation, integrating random variation compensation with environmental adaptation technologies, and leveraging the structural advantages of metal cylindrical circular gratings to enhance system performance. Through systematic compensation technologies, circular grating measurement systems can achieve higher-precision angular displacement measurement in various complex scenarios.

     

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