高级检索

2维超大行程快反镜的分段非线性拟合标定

Segmental nonlinear fitting calibration of 2-D ultra large stroke fast steering mirror

  • 摘要: 为了实现集高速扫描与精确指向功能于一体的2维超大行程快速反射镜(快反镜)的高重复定位精度与分辨率,采用分段标定方法,设计了2维超大行程快反镜角度标定系统;对多项式拟合法进行优化得到分段式非线性拟合法,并对标定模型进行了理论分析和实验测试。结果表明,在±5°范围内,传统的多项式拟合法标定误差最高达1.7 mrad,而优化后的分段式非线性拟合法在±5°标定的拟合误差小于8.2 μrad,xy轴分辨率分别可达4.6 μrad和5.6 μrad,xy轴重复定位精度分别为19.4 μrad和9.6 μrad。此研究对精确控制2维超大行程快反镜有重要的作用。

     

    Abstract: In order to achieve high repeatability and resolution of a 2-D ultra large stroke fast steering mirror(FSM) that integrates high-speed scanning and precise pointing functions, the 2-D segmental calibration was studied. The angle calibration system of 2-D ultra large strok FSM was constructed. The polynomial fitting method was optimized to obtain the segmental nonlinear fitting method, the calibration model was theoretically analyzed and experimentally tested. The results show that with the range of ±5°, the calibration error of the traditional polynomial fitting method is merely 1.7 mrad, while the fitting error of the optimized segmental nonlinear fitting method is less than 8.2 μrad, and the resolution of x and y axes can reach 4.6 μrad and 5.6 μrad respectively, and the repeatability of x and y axes is 19.4 μrad and 9.6 μrad respectively. This result plays an important role in the accurate control of 2-D ultra large stroke FSM.

     

/

返回文章
返回