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固体隙法布里-珀罗干涉仪成像特性仿真研究

Simulation of imaging characteristics of solid-gap Fabry-Pérot interferometer

  • 摘要: 法布里-珀罗(F-P)干涉仪多采用气体隙F-P腔结构,常受腔镜调节、稳定性、体积等因素的限制,为了解决上述问题,利用固体隙F-P腔结构进行了改进。基于多光束干涉理论对固体隙F-P干涉仪开展仿真研究,对各级次干涉条纹峰值位置和半峰全宽位置进行了求解,分析了固体隙F-P腔的腔长、反射率和介质折射率3个因素对固体隙F-P干涉仪的成像质量影响,并根据需求加工了一块16 mm厚的固体隙F-P腔样品。结果表明,1级条纹峰值位置偏差优于5个像素点,其它级次条纹偏差均优于2个像素点,两者吻合性较好。该工作初步验证了固体隙结构在干涉仪成像中的适用性和可扩展性,完成了固体隙F-P干涉仪的基础理论探索,并为固体隙F-P干涉仪的相关研发工作提供了参考。

     

    Abstract: Most Fabry-Pérot (F-P) interferometers that with a gas-gap F-P cavity structure are usually limited by mirror adjustment, stability, and volume limitations. To address these limitations, a solid-gap F-P cavity structure was proposed. A simulation of the solid-gap F-P interferometer was conducted using the theory of multi-beam interference to determine the peak position of each level of interference fringe and the half-height full-width position. The impact of three factors on the imaging quality of the solid-gap F-P interferometer was analyzed, which were cavity length, reflectivity and refractive index of the solid-gap F-P cavity. And a 16 mm thick solid-gap F-P cavity sample was processed according to the requirements. In comparing the actual detection with the theoretical simulation, it was found that the deviation of the peak position of the first level fringe is better than 5 pixels, and the deviation of the other levels of fringe is better than 2 pixels. The two are in good agreement. This work validates the applicability and scalability of the solid-gap structure in interferometer imaging, completes the basic theoretical exploration of the solid-gap F-P interferometer, and provides a reference for relevant research and development.

     

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