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皮秒脉冲激光对4H-SiC材料内部烧蚀改性的分子动力学模拟研究

Molecular dynamics simulation of internal ablative modification of 4H-SiC materials by picosecond pulsed laser

  • 摘要: 为了分析超快脉冲激光与4H-SiC在原子尺度的相互作用,采用双温模型的分子动力学方法,模拟研究了皮秒激光烧蚀4H-SiC内部的表现过程,并对不同激光能量强度辐照下4H-SiC内部的熔化温度、温度场、原子轨迹、烧蚀区域进行了分析。结果表明,皮秒激光与4H-SiC相互作用的过程主要是热烧蚀,烧蚀过程在激光脉冲结束后才会剧烈进行,且激光能量强度越大烧蚀过程越剧烈,烧蚀区域也越不规则;4H-SiC晶格熔化温度与体系压强有关,当系统体系压强为6.1 GPa时,晶格熔化温度为3230 K,高于其常压下晶格熔化温度2827 K约400 K,且当体系压强越大时,晶格熔化所需温度越高。这一结果为皮秒激光用于隐形切割4H-SiC提供了理论参考。

     

    Abstract: In order to analyze the interaction between ultrafast pulsed laser and 4H-SiC at atomic scale, the picosecond laser ablation process of 4H-SiC was simulated by molecular dynamics method of the two-temperature model, and the melting temperature, temperature field, atomic trajectory and ablation region of 4H-SiC were analyzed by different laser energy intensities. The results show that the interaction between picosecond laser and 4H-SiC is mainly thermal ablation, and the ablation process will be intense only after the end of the laser pulse, and the ablation process is more intense and the ablation region is more irregular with the laser energy intensity. The melting temperature of 4H-SiC crystal lattice is related to the system pressure. When the system pressure is 6.1 GPa, the melting temperature of the crystal lattice is 3230 K, which is about 400 K higher than the melting temperature of 2827 K under normal pressure, and the higher the system pressure, the higher the temperature required for the crystal lattice melting. This result provides a theoretical reference for picosecond laser for stealth dicing of 4H-SiC.

     

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