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InGaAs-Si基光电探测器异质集成技术研究进展

Progress in heterogeneous integration technology of InGaAs-Si based photodetectors

  • 摘要: 短波红外波段包含目标的多种光谱信息,具有良好的大气传输特性,是光电探测、激光通信等应用领域的重要波段之一。硅基光电子器件具有低功耗、高带宽等优势,但其光谱响应范围局限于可见光波段,难以直接进行短波红外波段的高响应度光电探测,将具有较高短波红外波段吸收能力的铟镓砷(InGaAs)材料与硅(Si)材料进行光电集成、研制新型高灵敏度光电探测器件成为了当前研究的热点方向。光电集成技术作为超高速、低功耗、小型化的半导体光电器件核心技术,有力支撑了大数据、云计算、物联网等新一代信息技术实现跨越式发展。通过梳理光电集成技术的国内外研究发展历程、现状和趋势,聚焦于InGaAs-Si基光电探测器,分别对材料外延生长、倒装芯片集成、芯片/晶圆键合和其他新型光电集成技术进行讨论,分析了不同光电集成技术的特点、优势、不足及应用场景,并展望了未来光电集成技术的发展方向。

     

    Abstract: The short-wave infrared band contains a variety of spectral information of the target and has good atmospheric transmission characteristics, which is one of the important bands for optoelectronic detection, laser communication and other applications. Silicon-based optoelectronic devices have the advantages of low power consumption and high bandwidth, but their spectral response range is limited to the visible band, making it difficult to directly carry out high-response photodetection in the short-wave infrared band. Therefore, the photoelectric integration of high short-wave infrared absorption ability of indium gallium arsenic (InGaAs) materials and silicon (Si) materials, and the development of a new type of high-sensitivity photodetector has become the hot direction of the current research. As the core technology of ultra-high-speed, low-power, miniaturized semiconductor optoelectronic devices, optoelectronic integration technology has strongly supported the leapfrog development of a new generation of information technology, such as big data, cloud computing, and the Internet of Things. By combing the domestic and international research and development history, current status, and future trends of optoelectronic integration technology, focusing on InGaAs-Si based photodetectors, the material epitaxial growth, flip chip integration, chip/wafer bonding, and other new optoelectronic integration processes were discussed. The characteristics, advantages, shortcomings, and usage scenarios of different optoelectronic integration technologies were analyzed, and the future development direction of optoelectronic integration technologies was envisioned.

     

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