In current technologies, bearing-based galvanometers remain the mainstream solution for scanning compensation applications. Such scanners offer significant advantages in terms of large scanning angles and high load capacity. However, when the operating frequency exceeds 50 Hz, their performance degrades markedly, primarily due to accelerated bearing wear, temperature-dependent damping variations, and the resulting stick-slip phenomena. Flexure-based galvanometers, as a promising alternative, effectively increase operational lifespan by eliminating mechanical friction, yet they still face challenges such as accumulated axis deviation errors caused by multi-stage structures and fatigue risks resulting from stress concentration. To meet the demands of high-speed and high-dynamic operating conditions in back-scan compensation applications, systematic optimization of novel flexure-based topological structures and their corresponding drive mechanisms can significantly enhance servo bandwidth and pointing stability within a limited scanning angle. Topology optimization helps achieve a balance between structural compliance and stiffness, while improvements in drive design suppress unwanted vibrations and response delays. As a result, the overall system performance is substantially improved: not only is scanning accuracy markedly enhanced, but environmental adaptability and robustness under complex working conditions are also significantly strengthened.

Focusing on the development of a high-performance galvanometer system, this study systematically carried out the topological configuration design of the entire machine, innovative design of the flexure-based support structure, and three-dimensional digital modeling. Building on the modeling work, finite element analysis (FEA) was employed as a core tool to investigate key parameters affecting the motor’s output torque and dynamic response performance. Through electromagnetic FEA simulations, the coupled effects of permanent magnet geometry, coil structural parameters, and air gap dimensions on system performance were thoroughly analyzed. The simulation results not only revealed the sensitivity of each parameter but also provided clear guidance for subsequent optimization, with the ultimate goals of maximizing torque efficiency and significantly reducing system power consumption. Based on the optimized parameters derived from the finite element analysis, a high-precision prototype of the galvanometer was designed and manufactured. To further validate the consistency between the theoretical model and actual performance, a dedicated test platform was constructed. This platform integrates a high-resolution position-sensitive detector (PSD) for accurate measurement of angular displacement accuracy and pointing stability. A high-speed data acquisition system captured scanning trajectories in real time and plotted dynamic response curves. Quantitative metrics, such as uniform motion nonlinearity, were used to evaluate the system’s tracking performance and dynamic accuracy under high-speed scanning conditions.

The developed galvanometer prototype demonstrated excellent overall performance, validating the effectiveness of the proposed structural design and optimization methodology. The flexure-based support structure exhibited high stiffness and high resonant frequency characteristics while maintaining motion freedom, with its natural frequency significantly exceeding the operational bandwidth, thereby effectively suppressing structural vibrations during high-speed scanning. Simulation results of the drive unit (Fig.5～Fig.10) revealed the influence of various parameters on the motor torque. The optimized electromagnetic design achieved high output torque while maintaining torque ripple at a low level, significantly improving motion stability. System performance tests further indicated that the galvanometer achieved high pointing precision within a ±2° angular range and completed a 12.5 ms period uniform scanning cycle at 50 Hz high-frequency operation (Fig.13), with the nonlinearity of the uniform scanning segment below 1%. This performance stemmed from the synergistic optimization of the flexure-based support structure and the electromagnetic drive unit: the former eliminated friction and nonlinear hysteresis, while the latter provided highly linear, low-fluctuation power output.

In the present study, a novel galvanometer system, driven by a moving-magnet voice coil motor with a monocrystalline silicon mirror as the load, has been successfully designed and implemented. Through systematic modeling and analysis of the overall structure, working principle, and mathematical model of the moving-magnet galvanometer, an innovative solution has been developed for high-dynamic scanning compensation applications. During the design and fabrication stages, simulation software was employed to conduct multiple rounds of iterative optimization on the electromagnetic drive unit, significantly improving the motor’s electromagnetic efficiency and dynamic response characteristics. This approach effectively shortened the development cycle and reduced prototyping costs. The coil winding process adopted in this system demonstrated higher production efficiency compared to conventional methods, showing promise for scalable manufacturing. Experimental results indicate that the developed galvanometer prototype achieves an optical deflection angle exceeding ±2° and realizes high-precision uniform scanning compensation with a 12.5 ms period at 50 Hz. The nonlinearity during the uniform scanning segment was controlled within 1%, meeting all design requirements for performance metrics. This achievement not only validates the technical advantages of the moving-magnet drive combined with a flexure-based support structure in high-frequency scanning systems but also demonstrates the broad application potential of such galvanometers in fields such as back-scan compensation. It provides a positive impetus toward promoting the engineering application of flexure-based galvanometers.