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CO2激光烧蚀聚酰亚胺膜表面质量的工艺优化研究

Research on process optimization for surface quality of polyimide film ablated by CO2 laser

  • 摘要: 为了优化CO2激光烧蚀聚酰亚胺薄膜工艺从而制备柔性电路板,采用了一种基于CO2激光直写聚酰亚胺(PI)膜的激光技术工艺,通过优化系统激光参数,实现高精度电路制备。采用连续激光器不同加工功率、扫描速率以及加工次数进行单因素实验,在PI膜上烧蚀出电路路径,进行了理论分析以及实验验证;并用超景深显微镜对路径进行观察和测量,得到扫描速率、加工功率以及加工次数对路径质量的影响规律。结果表明,最佳离焦量处于激光喷嘴与薄膜的距离为6 mm时,激光能量利用率最高,激光加工效率最高;激光功率、扫描速率对划线宽度具有显著影响,但扫描次数对宽度影响较小;在功率为9.6 W、扫描速率为75 mm/s、扫描1次的条件下,薄膜表面整洁且获得线宽为338.14 μm,此时的加工效果最好。本研究将能量密度与划线宽度结合起来寻找最佳加工距离,并建立激光参数与PI薄膜加工质量的定量关系模型,可为连续激光烧蚀PI薄膜工艺提供一定的指导作用,为高精度、高效率和低损伤的制备柔性电路板提供理论依据与技术支撑。

     

    Abstract:
    The rapid development of flexible and wearable electronics creates a pressing demand for high-precision, efficient, and environmentally friendly microfabrication techniques for polymer substrates. Polyimide (PI) film is an ideal base material for flexible printed circuit boards (FPCBs) due to its exceptional thermal stability, mechanical strength, and dielectric properties. Laser direct writing, particularly using CO2 lasers, has emerged as a promising non-contact method. However, controlling the ablation quality, especially minimizing the heat-affected zone (HAZ) and achieving desirable groove morphology for subsequent circuit embedding, remains a significant challenge. This study aims to systematically optimize the CO2 continuous laser ablation process for PI films. The core objective is to establish a quantitative relationship between key laser parameters and processing quality, thereby identifying an optimal parameter set to achieve clean, dimensionally controlled grooves suitable for flexible circuit fabrication.
    A commercial CO2 continuous laser engraving system with a maximum power of 80 W and a wavelength of 10.6 μm was employed. The material was 0.25 mm thick bare PI film. The research methodology comprised several key steps. First, the optimal focal position (stand-off distance) was determined by conducting single-point ablation tests. The laser nozzle-to-film distance varied from 2 mm to 10 mm. The diameters of the ablated pits were measured using an ultra-depth-of-field microscope, and the corresponding laser energy density was calculated (Fig.2, Fig.3, Table 3). This data, combined with subsequent line width measurements at different distances, pinpointed the focal point for minimal spot size and maximum energy density (Fig.5, Fig.8). Subsequently, a single-factor experimental approach was adopted to investigate the effects of laser power (6.4 W, 8.0 W, 9.6 W, 11.2 W, 12.8 W), scanning speed (75 mm/s to 175 mm/s), and number of scans (1 and 2) on the ablation quality. For each parameter combination, straight lines were ablated on the PI film. The primary response variable, the line width, was obtained by taking the average of three measurements per line using the ultra-depth-of-field microscope (Fig.6, Fig.7). The surface morphology, including the presence of carbonized graphene-like residues and HAZ, was simultaneously observed and analyzed to comprehensively assess processing quality (Fig.11, Fig. 12, Fig.14).
    The point ablation tests revealed that the calculated energy density first increased and then decreased with increasing nozzle distance, peaking at 334.46 J/mm2 at a distance of 6 mm (Fig.5). Correspondingly, the ablated line width reached a minimum at this same distance (Fig.8), confirming it as the optimal focal position (0 mm defocus) for achieving the finest feature size and highest energy utilization. The single-factor experiments on power and speed demonstrated their dominant influence on line width. Line width exhibited a general increasing trend with higher laser power and a decreasing trend with faster scanning speeds (Fig.9, Fig.10). Notably, within the power range of 8.0 W to 9.6 W, the increase in width was less pronounced. Microscopic observation attributed this to the formation and strong adhesion of laser-induced carbonaceous material (graphene) within the groove, which partially hindered direct ablation of the underlying PI. At lower speeds (e.g., 75 mm/s) or higher powers, this material was more easily removed by the auxiliary gas, resulting in wider and cleaner grooves. However, excessive power (11.2 W) led to a large and rough HAZ, and a power of 12.8 W caused complete penetration. At very high speeds (e.g., 175 mm/s), energy input was insufficient for consistent carbonization. The optimal surface quality, characterized by a clean, yellow-base groove free of debris, was achieved at 9.6 W and 75 mm/s, producing a line width of 338.14 μm (Fig.12). In contrast, other parameter sets resulted in either residual carbon deposits or excessive thermal damage. Experiments involving two scan passes showed only a marginal increase in line width compared to the change induced by varying power or speed (Fig.13). The primary effect of a second scan was to deepen the groove or alter the state of the carbonized layer, sometimes leading to poorer surface morphology or complete penetration if the energy was already high (Fig.14). This confirmed that laser power and scanning speed were the principal factors governing line width. A direct comparison between the optimized parameter set (9.6 W, 75 mm/s, 1 scan, 6 mm focal distance) and a non-optimized set validated the findings. The groove produced with optimized parameters was clean and well-defined, whereas the other showed debris or over-ablation (Fig.15).
    This study successfully establishes and validates a process optimization framework for CO2 continuous laser ablation of PI films. The main conclusions are as follows: the optimal focal distance for the specific experimental setup is identified as 6 mm between the laser nozzle and the PI film, which delivers the highest energy density and enables the smallest achievable line width. A quantitative model linking laser parameters to processing outcomes is developed. Laser power and scanning speed are the dominant factors controlling ablation line width and surface quality, primarily through their effect on the energy density delivered per unit area and the behavior of the laser-induced carbonization layer. The number of scans has a negligible effect on line width but can modify groove depth and surface morphology; it is not a primary controlling factor for width. The identified optimal parameter combination (9.6 W laser power, 75 mm/s scanning speed, single scan) produces a clean ablation groove with a width of 338.14 μm, which is suitable for subsequent processes such as conductive material embedding in flexible circuit board fabrication. This work provides a practical guideline for achieving high-quality, efficient laser processing of PI films for flexible electronics.

     

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