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脉冲激光沉积薄膜技术研究新进展

Study on pulsed laser deposition technology

  • 摘要: 脉冲激光沉积薄膜是近年来发展起来的使用范围最广、最有希望的制膜技术。陈述了其原理、特点、研究方法,总结了超快脉冲激光、脉冲激光真空弧、双光束脉冲激光沉积等最新的PLD薄膜制备技术研究进展。

     

    Abstract: The processes of pulsed laser deposition(PLD) technology,one of the most attractive thin film preparation methods,are described. The properties are listed in contrast with other methods. The fundamental approaches and the latest appropriate developments in PLD with ultra-fast pulsed laser,pulsed-laser-arc,and dual-beam lasers are discussed in detail.

     

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