Abstract: Planar optical waveguides in glass have been fabricated with field-assisted ion exchange and thermal ion exchange technology.The results show that the refractive profiles of the waveguids are different with the abve two methods.A waveguide with step-index profile has been got using field-assisted ion exchange technology while a variable index profile waveguide has been obtained with the latter method.The numerical results show that the optical waveguide with step-index profile fabricated by electric field-assisted ion exchange technology confines the optical field better.It has more advantages to fabricate active optical devices and integrated optical devices.