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高精度数字式光学膜厚监控系统

High precision digital optical monitor

  • 摘要: 通过对光学膜厚监控系统中光路部分、电路部分以及信号处理部分的噪声分析,设计出频率稳定性良好的斩光器、低噪声光接收电路和具有较强抗噪声性能的数字式锁相放大器,从而显著地提高了系统的精度和稳定性,为提高镀膜成功率和薄膜性能创造了有利的条件。将该系统应用于镀膜系统中,实验结果证实了该系统具有较高的精度和稳定性。

     

    Abstract: After analyzing the noise in light path,circuit and signal process in the system of optical monitor,the frequency-stabilized chopper,low noise receiving circuit and digital lock-in amplifier with excellent performance of noise restraint are designed.Thereby the precision and stability of the system is improved greatly.Applying the system in optical coating system,the optical monitor shows high precision and stability.

     

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