Abstract: In order to realize the application system integration and laser function expansion based on excimer laser source, a new type of excimer laser control system was designed in this paper. The personal computer (PC) terminal was based on LabVIEW software platform to realize human-computer interaction, and the laser terminal was based on microcontroller unit (MCU) main control module to control the hardware circuit and detect sensor signal. Optically isolated RS232 communication was adopted in LabVIEW and MCU. Real-time monitoring and control of excimer laser was achieved through virtual instruments on the computer. By theoretical analysis and experimental verification, it is proved that the system combines the good human-computer interaction with the PC terminal and the high-efficiency and stable real-time control of the MCU terminal. It effectively realizes the design of the overall control system under the strong electromagnetic interference of the discharge excitation excimer laser. The control system has great significance for the integration and functional expansion of excimer laser source based application system.