Abstract: In order to satisfy the applications with high quality beams and fast scanning, the formation of single flat-top and multiple flat-top beams were simulated by digital micromirror device and error diffusion method. An experimental setup with 680nm laser was built to validate the model. The beam shaping result was evaluated by using beam fill factor, light field modulation factor, root mean square error as parameters, and the energy utilization rate of beam shaping based on digital micromirror array was measured and analyzed. The results show that beam fill factors increase from 36.1% to 62.3%(single),56.7%(multiple) respectively, while light field modulation factors decrease from 73.3% to 25.6%(single),30.3%(multiple) respectively. Spatial shaping results show that the multiple flat-top beams are valuable in high quality beams and fast scanning.