Abstract: In order to improve the absorption efficiency of ordinary pulsed infrared laser for fused silica, a new method for 1064nm infrared laser etching fused silica assisted by barium compound powder coating was proposed. The etching products adhering to the surface of the groove etched by laser assisted by BaCrO₄, BaCl₂, and Ba(OH)₂ powder coating were tested and analyzed by means of energy dispersive spectrometer (EDS) and X-ray diffraction (XRD) respectively. The results show that the etching mechanisms of BaCrO₄ and Ba(OH)₂ powder have the chemical reaction to remove quartz glass and the corrosion rates are high. The etching mechanism of BaCl₂ powder has no chemical reaction to remove quartz glass and the corrosion rate is low. The study provides the technical basis for the industrial application of laser processing fused silica.