Abstract: In order to study the arts and crafts of stainless steel prepared with femtosecond laser,the technical condition and parametric optimization were studied in detail and applied in micromachining the micro-cantilever.The effect of laser fluence,scanning speed and scan times on the morphology of ablated area and ablation rate were analyzed.High quality micro-cantilevers in micrometer level were fabricated.The research shows that femtosecond laser micromachining is a promising and flexible way in micromachining of micro electromechanical devices.